CMOS compatibility of a micromachining process developed for semiconductor neural probe

Annual Reports of the Research Reactor Institute, Kyoto University

Volumn 4, Issue , 2001, Pages 3443-3445

  An, S K ^a   Oh, S J ^a   Kim, S J ^a  

^a Seoul National University   (South Korea)

Author keywords

CMOS compatibility; Neural probes

Indexed keywords

EID: 0035782469     PISSN: 04549244     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)