Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 95-99

  Vincenzi, D ^a   Butturi, M A ^a   Guidi, V ^b   Carotta, M C ^a   Martinelli, G ^a   Guarnieri, V ^c   Brida, S ^c   Margesin, B ^c   Giacomozzi, F ^c   Zen, M ^c   Pignatel, G U ^d   Vasiliev, A A ^e   Pisliakov, A V ^f  

^a UNIVERSITY OF FERRARA   (Italy)

^b INFN SEZIONE DI FERRARA   (Italy)

^c ITC IRST   (Italy)

^d UNIVERSITY OF TRENTO   (Italy)

^e KURCHATOV INSTITUTE   (Russian Federation)

^f CENTRAL RESEARCH INSTITUTE OF MACHINE BUILDING   (Russian Federation)

Author keywords

Gas sensor; Power; Screen printing

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROMACHINING; POLYSILICON; RESISTORS; SCREEN PRINTING; THICK FILM DEVICES;

MICROMACHINED HOTPLATES;

CHEMICAL SENSORS;

EID: 0035876231     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00679-7     Document Type: Article

References (18)