Igniters and temperature sensors for a micro-scale combustion system

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 253-262

  Zhang, Xin ^a   Mehra, Amit ^b   Ayón, Arturo A ^c   Waitz, Ian A ^b  

^a BOSTON UNIVERSITY   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c Sony Semiconductor   (United States)

Author keywords

Electrical interconnect; Igniters; Power MEMS; Temperature sensors

Indexed keywords

ANNEALING; ELECTRIC CONTACTS; ENGINES; FINITE ELEMENT METHOD; GAS TURBINES; GRAIN GROWTH; IGNITION; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MICROSENSORS; POLYSILICON; RESISTORS; SEGREGATION (METALLOGRAPHY); SEMICONDUCTOR DOPING; SILICON WAFERS; THIN FILMS;

IGNITERS; THERMAL ISOLATION;

COMBUSTORS;

EID: 0037438992     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00344-8     Document Type: Conference Paper

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