Micromachined flow sensors - A review

Flow Measurement and Instrumentation

Volumn 8, Issue 1, 1997, Pages 7-16

  Nguyen, N T ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Mechanical flow sensor; Micro electromechanical systems; Micromachining; Semiconductor sensor; Thermal flow sensor

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTOR DEVICES; SENSORS;

MICROMACHINED FLOW SENSORS; THERMAL FLOW SENSOR;

FLOWMETERS;

FLOWMETER; SENSOR;

EID: 0031089321     PISSN: 09555986     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-5986(97)00019-8     Document Type: Article

References (60)

1. Sze, S. M., Semiconductor Sensors. John Wiley and Sons, New York, 1994.
2. French, P. J., Gennissen, P. and Sarro, P. M., New micromachining techniques for microsystems. Proceeding of Eurosensors X, Vol. 2, 1996, pp. 465-472.
3. Gerlach, G. and Dötzel, W., Grundlagen der Mikrosystemtechnik. Hanser Verlag, München, 1997.
4. Tschulena, G., Marktchancen sensoren. Sensormagazin, 1995, 1, 1-4.
5. Fuhrmann, Mikrosystemtechnik - ein wachsender Markt. Sensor Magazin, 1994, 4, 1-5.
6. Van Putten, A. F. P. and Middelhoek, S., Integrated silicon anemometer. Electronic Letters, 1974, 10, 425-426.
7. Petersen, K. and Brown, J., High-precision, high-performance mass-flow sensor with integrated laminar flow micro-channels. Proceedings of Transducer '85, 1985, pp. 361-363.
8. de Bree, H. E., Leussink, P., Korthorst, T., Jahnsen, H., Lammerink, T. and Elwenspoek, M., The μ-FLOWN, a novel device measuring acoustical flows. Proceedings of Tranducers '95-Eurosensor IX, 1995, pp. 356-359.
9. Jungandreas, F., Untersuchungen zum Entwurf und zur Herstelllungstechnologie integrierter piezoresistiver Durchflußmengensensoren. Ph.D. Thesis, Technical University of Chemnitz-Zwickau, 1990.
10. Kersjes, R., Eichholz, J., Langerbein, A., Manoli, Y. and Mokwa, W., A integrated sensor for invasive blood-velocity measurement. Sensors and Actuators A, 1993, 37/38, 674-678.
11. van der Weil, J., Flow measurement concepts applied to silicon sensors. Ph.D. Thesis, Institute of Microtechnology, University of Neuchâtel, 1994.
12. Cho, S. T. and Wise, K. D., A high-performance microflowmeter with built-in self test. Sensors and Actuators A, 1993, 36, 47-56.
13. Boillant, M. A., van der Wiel, A. J., Hoogerwerf, A. C. and de Rooij, N. F., A differential pressure liquid flow sensor for flow regulation and dosing systems. MEMS '95, Amsterdam, 1995, pp. 350-352.
14. Gravesen, P., Branebjerg, J. and Ole, S. J., Microfluidics - a review. Journal of Micromechanics and Microengineering, 1993, 3, 168-182.
15. Liu, J., Tai, Y.-C. and Ho, C.-M., MEMS for pressure distribution studies of gaseous flows in microchannels. MEMS '95, Amsterdam, The Netherlands, 1995.
16. Enoksson, P., Stemme, G. and Stemme, E., A coriolis mass flow sensor structure in silicon. MEMS '96, San Diego, USA, 1996.
17. Enoksson, P., Stemme, G. and Stemme, E., Fluid density sensor based on resonance vibration. Sensors and Actuators A, 1995, 46/47, 327-331.
18. Vollmer, J., Hein, H., Menz, W. and Walter, F., Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators. Sensors and Actuators A, 1994, 43, 330-334.
19. Van Putten, A. F. P., An integrated silicon double bridge anemometer. Sensors and Actuators, 1983, 4, 387-396.
20. Tabata, O., Inagaki, H., Igarashi, I. and Kitano, T., Fast response silicon flow sensor with a thermal isolation structure. Proceeding of the 5th Sensor Symposium, The Institute of Electrical Engineers of Japan, Japan, 1985, pp. 207-211.
21. Tanaka, J., Jinda, A., Tabuchi, H., Tanaka, N., Furubayashi, H., Inami, Y. and Hijikigawa, M., A micro flow sensor with a substrate having a low thermal conductivity. Proceeding of the 6th Sensor Symposium, The Institute of Electrical Engineers of Japan, Japan, 1986, pp. 125-129.
22. Johnson, R. G. and Egashi, R. E., A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications. Sensor and Actuators A, 1987, 11, 63-67.
23. Qiu, L., Obermeier, E. and Schubert, A., A microsensor with integrated heat sink and flow guide for gas flow sensing applications. Trancducers '95 - Eurosensor IX, Vol. 130-C2, 1995, pp. 520-523.
24. Tai, Y. C. and Muller, R. S., Lightly-doped polysilicon bridge as a flow meter. Sensors and Actuators A, 1988, 15, 63-75.
25. Lammerink, T. S. J., Tas, N. R., Elwenspoek, M. and Fluitman, J. H. J., Micro-liquid flow sensor. Sensors and Actuators A, 1993, 37/38, 45-50.
26. Kiehnscherf, R., Nguyen, N. T. and Schulze, M., Elektrokalorischer Durchflußmengensensor für Gase und Öle. F & M Feinwerktechnik Mikrotechnik Messtechnik, 9/94, 402-406.
27. Nguyen, N. T. and Kiehnscherf, R., Low-cost silicon sensors for mass flow measurement of liquids and gases. Sensors and Actuators A, 1995, 49, 17-20.
28. Kuttner, H., Urban, G., Jachimowicz, A., Kohl, F., Olcaytug, F. and Goiser, P., Microminiaturized thermistors arrays for temperature gradient, flow and perfusion measurements. Sensors and Actuators A, 1991, 25-27, 641-645.
29. Neda, T., Nakamura, K. and Takumi, T., A polysilicon flow sensor for gas flowmeters. Proceeding of Tranducers '95 - Eurosensor IX, 1995, pp. 548-551.
30. Van Oudheusden, B. W. and Huijsing, J. H., Integrated flow friction sensor. Sensors and Actuators A, 1988, 15, 135-144.
31. Van Oudheusden, B. W., The thermal modelling of a flow sensor based on differential convective heat transfer. Sensors and Actuators A, 1991, 29, 93-106.
32. Van Oudheusden, B. W., Silicon thermal flow sensors. Sensors and Actuators A, 1992, 30, 5-26.
33. Bosman, J. W., De Bruijn, J. M., Reíedijk, F. R., Van Oudheusden, B. W. and Huijsing, J. H., Integrated smart two-dimension thermal flow sensor with Seebeck-voltage-to-frequency conversion. Sensors and Actuators A, 1992, 31, 9-16.
34. Verhoeven, H. J. and Huijsing, J. H., An integrated gas flow sensor with high sensitivity, low response time and pulse-rate output. Sensors and Actuators A, 1994, 41/42, 217-220.
35. Fricke, K., Mass-flow sensor with integrated electronics. Sensors and Actuators A, 1994, 45, 91-94.
36. Moser, D. and Baltes, H., A high sensitivity CMOS gas flow sensor on a thin dielectric membrane. Sensors and Actuators A, 1993, 37/38, 33-37.
37. Mayer, F., Paul, O. and Baltes, H., Influence of design geometry and packaging on the response of thermal CMOS flow sensors. Proceeding of Tranducers '95 -Eurosensor IX, 132-C2, 1995, pp. 528-531.
38. Robaday, J., Paul, O. and Baltes, H., Two-dimensional integrated gas flow sensors by CMOS IC technology. Journal of Micromechanics and Microengineering, 1995, 5, 243-250.
39. Mayer, F., Salis, G., Funk, J., Paul, O. and Baltes, H., Scaling of thermal CMOS gas flow microsensors experiment and simulation. MEMS '96, San Diego, USA, 1996, pp. 253-257.
40. Sekimura, M. and Shirouzu, S., Si flow sensor for velocity and direction sensing. Proceeding of the 4th Sensor Symposium, The Institute of Electrical Engineers of Japan, Japan, 1984, pp. 557-560.
41. Tong, Q. Y. and Huang, J. B., A novel CMOS flow sensor with constant chip temperature (CCT) operation. Sensors and Actuators A, 1987, 12, 9-12.
42. Stemme, G., A CMOS integrated silicon gas-flow sensor with pulse-modulated output. Sensors and Actuators A, 1988, 14, 293-303.
43. Kersjes, R., Eichholz, J., Langerbein, A., Manoli, Y. and Mokwa, W., An integrated sensor for invasive blood-velocity measurement. Sensors and Actuators A, 1993, 37/38, 674-678.
44. Van Der Wiel, J., Linder, C. and De Rooij, N. F., Liquid velocity sensor based on the hot-wire principle. Sensors and Actuators A, 1993, 37/38, 693-697.
45. Yang, C. Q. and Soeberg, H., Monolithic flow sensor for measuring millilitre per minute liquid flow. Sensors and Actuators A, 1992, 33, 143-153.
46. Yu, D., Hsieh, H. Y. and Zemel, J. N., Microchannel pyroelectric anemometer. Sensors and Actuators A, 1993, 39, 29-35.
47. Aihara, M. and Kawakami, K., Pyroelectric calorimetry. Proceeding of the 5th Sensor Symposium, The Institute of Electrical Engineers of Japan, Japan, 1985, pp. 81-84.
48. Hsieh, H. Y., Bau, H. H. and Zemel, J. N., Pyroelectric anemometry. Sensor and Actuators A, 1995, 49, 125-147.
49. Bouwstra, S., Resonating microbridge mass flow sensor. Ph.D. Thesis, University of Twente, Enschede, 1990.
50. Geijselaers, H. J. M. and Tijdeman, H., The dynamic mechanical characteristics of a resonating microbridge mass-flow sensor. Sensors and Actuators A, 1991, 29, 37-41.
51. Joshi, S. G., Flowsensors based on surface acoustic waves. Sensor and Actuators A, 1994, 44, 63-72.
52. Vellekoop, M. J., A smart Lamb-wave sensor system for the determination of fluids properties. Ph.D. Thesis, Delft University of Technology, Delft, 1994.
53. Huijsing, J. H., Riedijk, F. R. and van der Horn, G., Developments in integrated smart sensors. Transducer '93, Yokohama, USA, 1993, pp. 320-326.
54. Pan, Y., Riedijk, F. R. and Huijsing, J. H., A new class of integrated thermal oscillators with duty-cycle output for application in thermal sensor. Sensors and Actuators A, 1992, 21, 655-659.
55. Riedijk, F. R., Randemaker, G. and Huijsing, J. H., A dual-bit low-offset sigma delta analog-to-digital converter for integrated smart sensor. Sensors and Actuators A, 1993, 36, 157-164.
56. Lammerink, T. S. J., Dijkstra, F., Houkes, Z. and Van Kuijk, J., Intelligent gas-mixture sensor. Sensors and Actuators A, 1995, 46/47, 380-384.
57. Nguyen, N. T., Entwurf und Charakterisierung eines mikromechanischen elektrokalorischen Durchflußsensors (Design and characterisation of an micromachined electrocaloric flow sensor, in German). Ph.D. Thesis, Technical University of Chemnitz-Zwickau, Chemnitz, Germany, 1996.
58. Esashi, M., Integrated microflow control systems. Sensors and Actuators A, 1990, 21-23, 161-167.
59. Lammerink, T. S. J., Elwenspoek, M. and Fluiman, J. H. J., Integrated micro-liquid dosing system. Proceedings IEEE-MEMS Workshop, 1993, pp. 254-259.
60. Gass, V., van der Schoot, B. H. and de Rooij, N. F., Integrated flow-regulated silicon micropump. Technical Digest of Transducers '93, 1993, pp. 1048-1051.