Low-power thick-film gas sensor obtained by a combination of screen printing and micromachining techniques

Thin Solid Films

Volumn 391, Issue 2, 2001, Pages 288-292

  Vincenzi, D ^a   Butturi, M A ^a   Stefancich, M ^a   Malagu C ^a   Guidi, V ^a   Carotta, M C ^a   Martinelli, G ^a   Guarnieri, V ^b   Brida, S ^b   Margesin, B ^b   Giacomozzi, F ^b   Zen, M ^b   Vasiliev, A A ^c   Pisliakov, A V ^d  

^a UNIVERSITY OF FERRARA   (Italy)

^b ITC IRST   (Italy)

^c KURCHATOV INSTITUTE   (Russian Federation)

^d CENTRAL RESEARCH INSTITUTE OF MACHINE BUILDING   (Russian Federation)

Author keywords

Micromachining; Screen printing; Thick film gas sensor

Indexed keywords

DIELECTRIC MATERIALS; HEATING EQUIPMENT; MICROMACHINING; NITROGEN OXIDES; SCREEN PRINTING; THICK FILM DEVICES; VLSI CIRCUITS;

LOW POWER THICK FILM GAS SENSORS;

CHEMICAL SENSORS;

EID: 0035898885     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00997-X     Document Type: Conference Paper

References (30)