Thermal management of micro-hotplates using MEMCAD as simulation tool

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 640-643

  Briand, D ^a   Gretillat M A ^a   Van Der Schoot, B ^a   De Rooij, N F ^a  

^a Institute of Microtechnology   (Switzerland)

Author keywords

FEM Simulation; Gas sensors; MEMCAD; Micro Hotplates; Thermal

Indexed keywords

ACTUATORS; CHEMICAL SENSORS; CHEMICAL VAPOR DEPOSITION; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROMACHINING; MOSFET DEVICES; SILICON; THERMAL CONDUCTIVITY;

ELECTROTHERMAL SIMULATION; METAL OXIDES; MICRO-HOTPLATES; POWER CONSUMPTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0342777181     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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