Fully CMOS compatible low-power microheater

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 634-644

  Laconte, J ^a   Dupont, C ^a   Akheyar, A ^a   Raskin, J P ^a   Flandre, D ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

CMOS compatibility; Gas sensor; Membrane; Microheater; Silicon micromachining

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; MEMBRANES; MICROMACHINING; POLYSILICON; THERMAL INSULATION;

MICROHEATERS;

HEATING EQUIPMENT;

EID: 6444244389     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.462865     Document Type: Conference Paper

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