Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Sensors and Actuators, A: Physical

Volumn 105, Issue 3, 2003, Pages 311-319

  Davis, Z J ^a   Abadal, G ^b   Helbo, B ^a   Hansen, O ^a   Campabadal, F ^c   Perez Murano F ^b   Esteve, J ^c   Figueras, E ^c   Verd, J ^b   Barniol, N ^b   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^c CSIC   (Spain)

Author keywords

CMOS circuitry; Mass sensing nano cantilevers; Monolithic integration

Indexed keywords

ATMOSPHERIC PRESSURE; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; NANOSTRUCTURED MATERIALS; NATURAL FREQUENCIES; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; VACUUM;

MASS SENSORS;

SENSORS;

EID: 10744221068     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00208-5     Document Type: Article

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