Measurement of thermal conductivity and diffusivity of single and multilayer membranes

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 323-328

  Irace, Andrea ^a   Sarro, Pasqualina M ^b  

^a UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

HARMONIC ANALYSIS; SILICON NITRIDE; THERMAL CONDUCTIVITY; THERMAL DIFFUSION; THERMAL VARIABLES MEASUREMENT; THERMOCOUPLES; THERMODYNAMIC PROPERTIES;

POLYSILICON; THERMAL SENSORS; THIN FILM MEMBRANES;

THIN FILMS;

EID: 0343496784     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00284-2     Document Type: Article

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