Low power consumption thermal gas-flow sensor based on thermopiles of highly effective thermoelectric materials

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 1-4

  Dillner, Ulrich ^a,b   Kessler, Ernst ^a,b   Poser, Siegfried ^a   Baier, Volker ^a,b   Müller, J̈rgen ^a,b  

^a Institute of High Technology Physics   (Germany)

^b LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Gas flow sensors; Low power consumption; Thermal sensors; Thermoelectric materials; Thermopiles

Indexed keywords

CALCULATIONS; DIELECTRIC MATERIALS; FINITE ELEMENT METHOD; FLOW MEASUREMENT; FLOW OF FLUIDS; INTEGRATED CIRCUITS; MICROMACHINING; PORTABLE EQUIPMENT; THERMOPILES; VELOCITY;

GAS FLOW SENSORS; LOW POWER CONSUMPTION; THERMAL SENSORS; THERMOELECTRIC MATERIALS;

CHEMICAL SENSORS;

EID: 0031147617     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01409-4     Document Type: Article

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