Microwave micromachined structures on 〈100〉 silicon substrate using polyimide-supported pads

Microelectronic Engineering

Volumn 51, Issue , 2000, Pages 595-600

  Petrini, Ioana ^a   Muller A ^a   Avramescu, V ^a   Iordanescu, S ^a   Dascalu, D ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM COMPOUNDS; DIELECTRIC MATERIALS; INTEGRATED CIRCUIT MANUFACTURE; MEMBRANES; MICROWAVE CIRCUITS; MICROWAVE MEASUREMENT; POLYIMIDES; SUBSTRATES;

DIELECTRIC MEMBRANES; MICROWAVE MICROMACHINED STRUCTURES; POLYIMIDE SUPPORTED PADS;

SEMICONDUCTING SILICON;

EID: 17344393898     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00522-5     Document Type: Article

References (4)

1. L.P. Katehi, G. Rebeiz, IEEE MTT-S Digest, 1996, p. 1145.
2. A. Muller, R. Marcelli, I. Petrini, V. Avramescu, S. Iordanescu, S. Petricco, L. Scopa, C. Risi, D. Vasilache, in: Proc. Micromechanics Europe Workshop 1997 (MME'97), Southampton, UK, p. 59.
3. A. Muller, D. Dascalu, D. Neculoiu, S. Iordanescu, I. Petrini, V. Avramescu, D. Vasilache, R. Marcelli, in: Proc. Micromechanics Europe Workshop 1998 (MME'98), Ulvik in Hardanger, Norway, p. 151.
4. A. Muller, I. Petrini, R. Marcelli, S. Iordanescu, V. Avramescu, D. Vasilache, in: Proc. 9th Mediterranean Electrotechnical Conf. (MELECON 1998), Tel Aviv, p. 387.