Development and application of microthermal sensors with a mesh-membrane supporting structure

Sensors and Actuators, A: Physical

Volumn 84, Issue 1, 2000, Pages 70-75

  Hung, Shih Ta ^a   Wong, Shwin Chung ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; FORCE MEASUREMENT; PIEZOELECTRIC DEVICES; PLATINUM; THERMISTORS;

CONSTANT VOLTAGE MODE; FLOW SENSORS; MESH-MEMBRANE; POWER CONSUMPTION; THERMAL SENSOR;

MICROSENSORS;

EID: 0034251237     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00358-1     Document Type: Article

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