Single-chip CMOS anemometer

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 895-898

  Mayer, F ^a   Haberli, A ^a   Jacobs, H ^a   Ofner, G ^a   Paul, O ^a   Baltes, H ^a  

^a Physical Electronics Laboratory   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ON CHIP POWER MANAGEMENT; SIGNAL CONDITIONING; THERMAL FLOW SENSORS;

ANALOG TO DIGITAL CONVERSION; CMOS INTEGRATED CIRCUITS; ELECTRONICS PACKAGING; FLIP CHIP DEVICES; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; SENSORS; SUBSTRATES;

ANEMOMETERS;

EID: 84886447992     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)