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Microelectronics Journal

Volumn 29, Issue 4-5, 1998, Pages 291-297

Thermal simulation of a micromachined thermopile-based thin-film gas flow sensor

(5) Dillner, U a Kessler, E a Poser, S a Baier, V a Muller J a

a Inst f Phys High Technol (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPUTER SIMULATION; COOLING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; THERMOPILES; THIN FILMS; TWO DIMENSIONAL; VELOCITY;

FLOW INDUCED COOLING; THERMAL FLOW SENSORS;

MICROELECTRONICS;

EID: 0032043033 PISSN: 00262692 EISSN: None Source Type: Journal
DOI: 10.1016/s0026-2692(97)00069-4 Document Type: Article

Times cited : (13)

References (10)

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