A monolithic CMOS microhotplate-based gas sensor system

IEEE Sensors Journal

Volumn 2, Issue 6, 2002, Pages 644-655

  Afridi, Muhammad Y ^a,b   Suehle, John S ^a,b   Berning, David W ^b   Hefner, A R ^a,b   Cavicchi, Richard E ^b   Semancik, Steve ^b   Montgomery, Christopher B ^b   Taylor, Charles J ^c  

^a IEEE   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c POMONA COLLEGE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS MOLECULES; LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); MICROHOTPLATES; THERMAL EFFICIENCY;

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; FILM GROWTH; GAS SENSING ELECTRODES; MICROMACHINING; MOSFET DEVICES; THERMODYNAMIC PROPERTIES;

CHEMICAL SENSORS;

EID: 2342662898     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2002.807780     Document Type: Article

References (14)

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