MOS transistor pressure sensor

Proceedings of the IEEE International Caracas Conference on Devices, Circuits and Systems, ICCDCS

Volumn , Issue , 1998, Pages 381-385

  Alcantara, Salvador ^a   Cerdeira, Antonio ^a   Romero Paredes, Gabriel ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; DIAPHRAGMS; DIFFERENTIAL AMPLIFIERS; MICROELECTROMECHANICAL DEVICES; MOSFET DEVICES;

PIEZORESISTIVE EFFECT; PIEZORESISTIVE SENSORS; SEMICONDUCTOR PRESSURE SENSOR; SILICON SQUARE DIAPHRAGMS;

SENSORS;

EID: 0031622343     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)