Very low power consumption micromachined CO sensors

Sensors and Actuators, B: Chemical

Volumn 55, Issue 2, 1999, Pages 140-146

  Faglia, G ^a   Comini, E ^a   Cristalli, A ^a   Sberveglieri, G ^a   Dori, L ^b  

^a INFM   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DOPING;

FAST PULSED TEMPERATURE SUPPLYING TECHNIQUES;

CHEMICAL SENSORS;

EID: 0032644292     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00044-1     Document Type: Article

References (12)

1. x thin films. Sensors and Actuators B. 42:1997;205-215.
2. L. Dori, P. Maccagnani, G.C. Cardinali, M. Fiorini, I. Sayago, S. Guerri, R. Rizzoli, G. Sberveglieri. New materials and heater geometry for high performance micromachined thermally insulated structures in gas sensor applications, in: Proc. Eurosensors XI, Vol. 1, Warsaw, September 1997, pp. 289-292.
3. P. Maccagnani, R. Angelucci, P. Pozzi, A. Poggi, L. Dori, G.C. Cardinali, P. Negrini. Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensors, in: Transducers 97, Vol. 1, Chicago, June 1997, pp. 213-216.
4. Semancik S., Cavicchi R.E., Kreider K.G., Suehle J.S., Chaparala P. Selected area deposition of multiple active films for conductometric microsensor arrays. Sensors and Actuators B. 34:1996;209-212.
5. Johnson C.L., Schwank J.W., Wise K.D. Integrated ultra-thin-film gas sensors. Sensors and Actuators B. 20:1994;55-62.
6. Sberveglieri G. Recent developments in semiconducting film gas sensors. Sensors and Actuators B. 23:1995;103-109.
7. X monitoring, Sensors and Actuators B 26-27 (1995) 89-92.
8. Seto J.Y.W. The electrical properties of polycristalline silicon films. J. Appl. Phys. 46:1975;5247-5254.
9. Orton J.W., Powell M.J. The Hall effect in polycristalline and powdered semiconductors. Rep. Prog. Phys. 43:1980;1265-1306.
10. Rantala T.S., Lannto V., Rantala T.T. Rate equation simulation of the height of schottky barriers at the surface of oxidic semiconductors. Sensors and Actuators B. 13-14:1993;234-237.
11. M.J. Madou, R. Morrison, Chemical Sensing with Solid State Devices. Academic Press, San Diego, 1989.
12. 2. Surf. Sci. 86:1979;335.