Capacitive humidity sensor using a polyimide sensing film

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 223-228

  Laconte, J ^a   Wilmart, V ^a   Raskin, J P ^a   Flandre, D ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

Absorption; Aluminum; Capacitive sensors; Design optimization; Electrodes; Fingers; Humidity; Insulation; Mathematical model; Polyimides

Indexed keywords

EID: 84945980805     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287041     Document Type: Conference Paper

References (10)

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