Optimization of an integrated SnO2 gas sensor using a FEM simulator

Sensors and Actuators, A: Physical

Volumn 69, Issue 3, 1998, Pages 205-211

  Astie S ^a,b   Gue A M ^a   Scheid, E ^a   Lescouzeres L ^b   Cassagnes, A ^b  

^a LAAS CNRS   (France)

^b MOTOROLA INC   (United States)

Author keywords

FEM electrothermal modelling; Gas sensor; Silicon membrane; SnO2

Indexed keywords

COMPUTER SIMULATION; ENERGY UTILIZATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MEMBRANES; OPTIMIZATION; SILICON; TEMPERATURE DISTRIBUTION; TIN COMPOUNDS;

ELECTROTHERMAL SIMULATION; SOFTWARE PACKAGE SESES; THIN SILICON MEMBRANES;

CHEMICAL SENSORS;

EID: 0032164717     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00096-X     Document Type: Article

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