High-Sensitivity Capacitive Humidity Sensor Using 3-Layer Patterned Polyimide Sensing Film

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 372-377

  Laconte, J ^a   Wilmart, V ^a   Flandre, D ^a   Raskin, J P ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

Capacitive humidity sensors; CMOS compatibility; Interdigitated electrodes; Polyimide

Indexed keywords

ATMOSPHERIC HUMIDITY; CMOS INTEGRATED CIRCUITS; DEPOSITION; ELECTRODES; INTEGRATED CIRCUIT LAYOUT; OPTIMIZATION; POLYIMIDES; SILICON ON INSULATOR TECHNOLOGY; THIN FILMS;

CAPACITIVE HUMIDITY SENSORS; CMOS-COMPATIBILITY; INTERDIGITATED ELECTRODES; POLYIMIDE SENSING FILMS;

SENSORS;

EID: 1542363558     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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