Thermal microsensor with a.c. Heating for gas-pressure measurements

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 571-575

  Grudin, Oleg M ^a,c   Frolov, Gennadiy A ^a   Katsan, Ivan I ^b,d   Lupina, Boris I ^b,e  

^a Sensor Systems Ltd   (Ukraine)

^b NATIONAL TECHNICAL UNIVERSITY OF UKRAINE   (Ukraine)

^c R and D Div of Sensors Systems Ltd   (Ukraine)

^d 'Crystal' Enterprise   (Ukraine)

^e 'Arsenal' Enterprise   (Ukraine)

Author keywords

Gas pressure measurements; Micromachining; Thermal sensors

Indexed keywords

GAS HEATING; HEAT LOSSES; MICROMACHINING; PRESSURE MEASUREMENT; RESISTORS; SENSITIVITY ANALYSIS; SILICON NITRIDE; SPECIFIC HEAT OF SOLIDS;

THERMAL MICROSENSORS; THERMORESISTORS;

SILICON SENSORS;

EID: 0031176826     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01571-9     Document Type: Article

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