Determining mean and gradient residual stresses in thin films using micromachined cantilevers

Journal of Micromechanics and Microengineering

Volumn 6, Issue 3, 1996, Pages 301-309

  Fang, W ^a   Wickert, J A ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; COMPRESSION TESTING; DEFORMATION; RESIDUAL STRESSES; TENSILE TESTING;

GRADIENT STRESSES; MICROMACHINED CANTILEVERS; STRESS MEASUREMENT;

THIN FILMS;

EID: 0030230992     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/3/002     Document Type: Article

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