Dependence of the temperature distribution in micro hotplates on heater geometry and heating mode

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 73-76

  Ruther, P ^a   Ehmann, M ^a   Lindemann, T ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Biomembranes; Geometrical optics; Geometry; Heating; Silicon; Temperature distribution; Temperature measurement; Temperature sensors; Testing; Thermistors

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; GEOMETRICAL OPTICS; GEOMETRY; HEATING; MICROSYSTEMS; SILICON; TEMPERATURE DISTRIBUTION; TEMPERATURE MEASUREMENT; TEMPERATURE SENSORS; TESTING; THERMISTORS; TRANSDUCERS;

BIOMEMBRANES; FINITE ELEMENT SIMULATIONS; HEATER GEOMETRY; HEATING MODE; MICROHOTPLATES; NUMERICAL RESULTS; SUSPENDED MEMBRANES; TEST STRUCTURE;

SOLID-STATE SENSORS;

EID: 32044432553     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215256     Document Type: Conference Paper

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