Resistive Gas Sensor with Integrated MOSFET Micro Hotplate based on an Analogue SOI CMOS Process

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1389-1394

  Covington, J A ^a   Udrea, F ^b   Gardner, J W ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Micro hot plate; MOSFET heater; SOI CMOS technology; Solid state gas sensor

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; ELECTRIC POWER UTILIZATION; ELECTRODES; MOSFET DEVICES; SILICON; SOLID STATE DEVICES;

MICRO-HOT PLATES; SOLID-STATE GAS SENSORS;

CHEMICAL SENSORS;

EID: 1442306765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. I. Ihokura, J. Watson, The Stannic Gas Sensors, CRC Press 1994.
2. J.W. Gardner, A. Pike, N.F. de Rooij, M. Koudelkahep, P.A. Clerc, A. Hierlemann, W. Gopel, Integrated array sensor for detecting organic solvents, Sensors and Actuators B, Vol. 26-27, pp135167, 1995.
3. F. Udrea and J.W. Gardner, "Smart MOSFET gas sensor", UK and World patent application GB2321336A and WO98/32009, filed January 1997.
4. J.W. Gardner, F. Udrea, W.I. Milne, "Numerical simulation of a new generation of novel SOI MOSFET based gas sensors", Proc. of SPIE Smart Electronics and MEMS, Vol. 3673, pp. 104-112, 1999.
5. C.C. Lu, D. Setiadi, F. Udrea, W.I. Milne, J.A. Covington, J.W. Gardner, Modelling and Simulation Microsystems (MSM 200), San Diego, pp. 297-300.
6. R.L. Geiger, P.E. Allen, N.R. Starder, VLSI: Design techniques for analogue and digital circuits, McGraw-Hill, 1990 S.M. Sze, Semiconductor devices: Physics and Technology, Wiley, 1985.
7. S.M. Sze, Semiconductor devices: Physics and Technology, Wiley, 1985.
8. J. A. Covington, J.W. Gardner, J.V. Hatfield, Conducting polymer FET devices for vapour sensing, Proc. of SPIE Smart Electronics and MEMS (1999), pp. 296-307.