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Volumn 2, Issue 2, 2003, Pages 1314-1317

Accelerated Ageing of Micro-Hotplates for Gas Sensing Applications

Author keywords

Accelerated ageing; Burn in; Gas sensors; Micro heater; Micro hotplates; Platinum; Reliability

Indexed keywords

AGING OF MATERIALS; COATINGS; DEFORMATION; DEGRADATION; FAILURE ANALYSIS; MEMBRANES; PLATINUM; TRANSDUCERS;

EID: 1542303434     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (11)

References (12)
  • 2
    • 0344146574 scopus 로고    scopus 로고
    • Pyrotechnic actuator: A new generation of Si integrated actuator for biomedical and micro-spacecraft application
    • C. Rossi, D. Estève, C. Mingues, "Pyrotechnic actuator: a new generation of Si integrated actuator for biomedical and micro-spacecraft application", Sens. & Act., A74 (1999) 211-215.
    • (1999) Sens. & Act. , vol.A74 , pp. 211-215
    • Rossi, C.1    Estève, D.2    Mingues, C.3
  • 3
    • 0343289075 scopus 로고    scopus 로고
    • Micro-machined metal oxide gas sensors: Opportunities to improve sensor performance
    • I. Simon, N. Barsan, M. Bauer, U. Weimar, "Micro-machined metal oxide gas sensors: Opportunities to improve sensor performance", Sens. & Act., B73 (2001) 1-26.
    • (2001) Sens. & Act. , vol.B73 , pp. 1-26
    • Simon, I.1    Barsan, N.2    Bauer, M.3    Weimar, U.4
  • 4
    • 0032083810 scopus 로고    scopus 로고
    • Accelerated life testing for micro-machined chemical sensors
    • J.M. Bosc, Y. Guo, V. Sarihan, T. Lee, "Accelerated life testing for micro-machined chemical sensors", IEEE Trans. on Reliability, 47 (1998) 135-141.
    • (1998) IEEE Trans. on Reliability , vol.47 , pp. 135-141
    • Bosc, J.M.1    Guo, Y.2    Sarihan, V.3    Lee, T.4
  • 5
    • 0035396342 scopus 로고    scopus 로고
    • Operation and short-term drift of polysilicon-heated CMOS micro-structures at temperature up to 1200 K
    • M. Ehmann, P. Ruther, M von Arx, O. Paul, "Operation and short-term drift of polysilicon-heated CMOS micro-structures at temperature up to 1200 K", J. Micromech. Microeng., 11 (2001) 397-401.
    • (2001) J. Micromech. Microeng. , vol.11 , pp. 397-401
    • Ehmann, M.1    Ruther, P.2    Von Arx, M.3    Paul, O.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.