Atomic layer deposition

High-K Gate Dielectrics

Volumn , Issue , 2003, Pages 17-64

  Ritala, Mikko ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

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Indexed keywords

EID: 85059708131     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

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