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Volumn 231, Issue 1-2, 2001, Pages 262-272

Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide

(9) Kukli, Kaupo a,b Forsgren, Katarina c Aarik, Jaan a Uustare, Teet a Aidla, Aleks a Niskanen, Antti b Ritala, Mikko b Leskelä, Markku b Hårsta, Anders c

a UNIVERSITY OF TARTU (Estonia)

b UNIVERSITY OF HELSINKI (Finland)

c UPPSALA UNIVERSITY (Sweden)

Author keywords

A1. Adsorption; A1. Crystal structure; A2. Characterization; A3. Atomic layer epitaxy; B1. Oxides; B2. Dielectric materials

Indexed keywords

DEPOSITION; FILM GROWTH; HYDROGEN PEROXIDE; SILICA; SILICON; SUBSTRATES; THICK FILMS; WATER; ZIRCONIA;

ATOMIC LAYER DEPOSITION (ALD); ZIRCONIUM TETRAIODIDE;

DIELECTRIC FILMS;

EID: 0035452393 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(01)01449-X Document Type: Article

Times cited : (81)

References (50)

1
- 0000020022
- (2000) Appl. Phys. Lett. , vol.76 , pp. 436
- Gopel, M.¹ Gribelyuk, M.² Gusev, E.³

2
- 0001494942
- (2000) Appl. Phys. Lett. , vol.76 , pp. 502
- Ngai, T.¹ Qi, W.J.² Sharma, R.³ Fretwell, J.⁴ Chen, X.⁵ Lee, J.C.⁶ Banerjee, S.⁷

3
- 0000329357
- (1996) J. Raman Spectrosc. , vol.27 , pp. 785
- Urlacher, C.¹ Mugnier, J.²

4
- 0027742283
- (1993) J. Chromatogr. A , vol.657 , pp. 229
- Nawrocki, J.¹ Rigney, M.P.² McGormick, A.³ Carr, P.W.⁴

5
- 0001374850
- (1988) Catal. Lett. , vol.1 , pp. 395
- Asakura, K.¹ Aoki, M.² Iwasawa, Y.³

6
- 0001074582
- (1998) Phys. Rev. B , vol.58 , pp. 8050
- Christensen, A.¹ Carter, E.A.²

7
- 0000355982
- (1993) Phys. Rev. B , vol.47 , pp. 14075
- Leger, J.M.¹ Tomaszewski, P.E.² Atouf, A.³ Pereira, A.S.⁴

8
- 84984148205
- (1995) Adv. Mater. Opt. Electron. , vol.5 , pp. 163
- Treichel, H.¹ Mitwalsky, A.² Tempel, G.³ Zorn, G.⁴ Bohling, D.A.⁵ Coyle, K.R.⁶ Felker, B.S.⁷ George, M.⁸ Kern, W.⁹ Lane, A.P.¹⁰ Sandler, N.P.¹¹

9
- 0033882660
- (2000) J. Non-Cryst. Solids , vol.262 , pp. 106
- Molodetsky, I.¹ Navrotsky, A.² Paskowitz, M.J.³ Leppert, V.J.⁴ Risbud, S.H.⁵

10
- 0001527594
- (1990) J. Appl. Phys. , vol.67 , pp. 3826
- Kao, A.S.¹ Gorman, G.L.²

11
- 0000741490
- (1990) Mater. Res. Soc. Symp. Proc. , vol.168 , pp. 349
- Desu, S.B.¹ Shi, T.² Kwok, C.K.³

12
- 0001768615
- (1997) Electrochem. Soc. Proc. , vol.97 , Issue.25 , pp. 417
- Bourhila, N.¹ Felten, F.² Senateur, J.P.³ Schuster, F.⁴ Madar, R.⁵ Abrutis, A.⁶

13
- 0001093724
- (1992) Eur. J. Solid State Inorg. Chem. , vol.29 , pp. 213
- Xue, Z.¹ Vaartstra, B.A.² Gaulton, K.G.³ Grisholm, M.H.⁴ Jones, D.L.⁵

14
- 0034504048
- (2000) J. Electrochem. Soc. , vol.147 , pp. 4541
- Bunt, P.¹ Varhue, W.J.² Adams, E.³ Mongeon, S.⁴

15
- 0000167806
- (1995) Phys. Rev. B , vol.52 , pp. 9266
- Balzaretti, N.M.¹ Da Jornada, J.A.H.²

16
- 0032685531
- (1999) J. Mater. Res. , vol.14 , pp. 3192
- Park, J.-H.¹ Parise, J.B.² Woodward, P.M.³ Lubomirsky, I.⁴ Stafsudd, O.⁵

17
- 0001669189
- (1993) Acta Chem. Scand. , vol.47 , pp. 292
- Miller, J.B.¹ Schwartz, J.²

18
- 0033188109
- (1999) J. Phys. IV (France) , vol.9
- Schmidt, C.¹ Lehnert, W.² Leistner, T.³ Frey, L.⁴ Ryssel, H.⁵

19
- 0028758883
- (1994) Appl. Surf. Sci. , vol.75 , pp. 333
- Ritala, M.¹ Leskelä, M.²

20
- 0030737099
- (1997) J. Electrochem. Soc. , vol.144 , pp. 300
- Kukli, K.¹ Ihanus, J.² Ritala, M.³ Leskelä, M.⁴

21
- 0001140789
- (2000) Chem. Vap. Deposition , vol.6 , pp. 297
- Kukli, K.¹ Ritala, M.² Leskelä, M.³

22
- 3743147318
- (1996) Langmuir , vol.12 , pp. 4395
- Kytökivi, A.¹ Lakomaa, E.-L.² Root, A.³

23
- 0001277844
- (1997) Langmuir , vol.13 , pp. 2717
- Kytökivi, A.¹ Lakomaa, E.-L.² Root, A.³ Österholm, H.⁴ Jacobs, J.-P.⁵ Brongersma, H.H.⁶

24
- 77956897740
- G. Poncelet, et al., (Eds.), Elsevier, Amsterdam
- (1995) Preparation of Catalysts VI , pp. 957
- Haukka, S.¹ Kytökivi, A.² Lakomaa, E.-L.³ Lehtovirta, U.⁴ Lindblad, M.⁵ Lujala, V.⁶ Suntola, T.⁷

25
- 0031251542
- (1997) Nanostruct. Mater. , vol.8 , pp. 785
- Kukli, K.¹ Ritala, M.² Leskelä, M.³

26
- 0342520856
- (1999) J. Phys. IV (France) , vol.9
- Forsgren, K.¹ Hårsta, A.²

27
- 0032653080
- (1999) Thin Solid Films , vol.340 , pp. 110
- Aarik, J.¹ Aidla, A.² Kiisler, A.-A.³ Uustare, T.⁴ Sammelselg, V.⁵

28
- 0027659199
- (1993) Thin Solid Films , vol.232 , pp. 56
- Ylilammi, M.¹ Ranta-aho, T.²

29
- 0029264144
- (1995) J. Crystal Growth , vol.148 , pp. 268
- Aarik, J.¹ Aidla, A.² Uustare, T.³ Sammelselg, V.⁴

30
- 19944385893
- (1975) Nature , vol.258 , pp. 703
- Garvie, R.C.¹ Hannink, R.H.² Pascoe, R.T.³

31
- 21544454515
- (1978) J. Phys. Chem. , vol.82 , pp. 218
- Garvie, R.C.¹

32
- 0000453551
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 1211
- Moulzolf, S.C.¹ Yu, Y.² Frankel, D.J.³ Lad, R.J.⁴

33
- 84987313411
- (1984) J. Am. Ceram. Soc.
- Morgan, P.E.D.¹

34
- 67349207828
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 3528
- Srinivasan, R.¹ Rice, L.² Davis, B.H.³

35
- 84985155806
- (1992) J. Am. Ceram. Soc. , vol.75 , pp. 1217
- Srinivasan, R.¹ Davis, B.² Cavin, O.B.³ Hubbard, C.R.⁴

36
- 0001548469
- (1998) Chem. Mater. , vol.10 , pp. 2020
- Stichert, W.¹ Schüth, F.²

37
- 0004516920
- Thesis, Dissert. Phys. Univ. Tartuensis
- (1999) , vol.26
- Kukli, K.¹

38
- 0032158164
- (1998) Acta Mater. , vol.46 , pp. 5095
- Roytburd, A.L.¹ Kim, T.S.² Su, Q.³ Slutsker, J.⁴ Wutting, M.⁵

39
- 0031144214
- (1997) Mater. Lett. , vol.31 , pp. 23
- Khor, K.A.¹ Yang²

40
- 0024054661
- (1988) Jpn. J. Appl. Phys. , vol.27
- Fukumoto, H.¹ Imura, T.² Osaka, Y.³

41
- 0001800786
- (1999) Jpn. J. Appl. Phys. , vol.38
- Nagashima, M.¹ Nakano, S.² Sasaki, K.³ Hata, T.⁴

42
- 0000340164
- (1994) J. Appl. Phys. , vol.75 , pp. 2902
- Bardal, A.¹ Matthee, Th.² Wecker, J.³ Samwer, K.⁴

43
- 0026925633
- (1992) Thin Solid Films , vol.217 , pp. 125
- Lubig, A.¹ Buchal, Ch.² Guggi, D.³ Jia, C.L.⁴ Stitzker, B.⁵

44
- 0000852313
- (1997) Chem. Mater. , vol.9 , pp. 1256
- Navio, J.A.¹ Colón, G.² Sánchez-Soto, P.J.³ Macias, M.⁴

45
- 0004277185
- Edward Arnold, London
- Comparative Inorganic Chemistry, 3rd Edition , pp. 107
- Moody, B.¹

46
- 33947091276
- (1972) J. Phys. Chem. , vol.76 , pp. 1497
- Holmes, H.F.¹ Fuller E.R., Jr.² Cammage, R.B.³

47
- 4243244673
- (1997) Thin Solid Films , vol.308-309 , pp. 363
- Mehner, A.¹ Klümper-Westkamp, H.² Hofmann, F.³ Mayr, P.⁴

48
- 0035115268
- (2001) Chem. Mater. , vol.13 , pp. 122
- Kukli, K.¹ Aarik, J.² Aidla, A.³ Forsgren, K.⁴ Sundqvist, J.⁵ Hårsta, A.⁶ Uustare, T.⁷ Mändar, H.⁸ Kiisler, A.-A.⁹

49
- 0034188662
- (2000) J. Crystal Growth , vol.212 , pp. 459
- Kukli, K.¹ Ritala, M.² Matero, R.³ Leskelä, M.⁴

50
- 0004524073
- (1995) J. Nucl. Mater. , vol.227 , pp. 58
- Vaillancourt, M.¹ Khatamian, D.² Maguire, M.A.³

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