Trap-assisted tunneling in high permittivity gate dielectric stacks

Journal of Applied Physics

Volumn 87, Issue 12, 2000, Pages 8615-8620

  Houssa, M ^a,b   Tuominen, M ^c   Naili, M ^b   Afanas'ev, V ^a   Stesmans, A ^a   Haukka, S ^c   Heyns, M M ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

^c ASM Microchemistry Oy   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000954294     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373587     Document Type: Article

References (22)

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