In situ quartz crystal microbalance and quadrupole mass spectrometry studies of atomic layer deposition of aluminum oxide from trimethylaluminum and water

Langmuir

Volumn 17, Issue 21, 2001, Pages 6506-6509

  Rahtu, Antti ^a   Alaranta, Teemu ^a   Ritala, Mikko ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

LIGANDS;

CRYSTALS; DEPOSITION; MASS SPECTROMETRY; QUARTZ; REACTION KINETICS; THERMAL EFFECTS; WATER;

ALUMINUM COMPOUNDS;

EID: 0035900121     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la010103a     Document Type: Article

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