SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Chemical Vapor Deposition

Volumn 7, Issue 1, 2001, Pages 44-50

Low-temperature ALE deposition of Y2O3 thin films from β-diketonate precursors

(4) Putkonen, Matti a Sajavaara, Timo b Johansson, Leena Sisko a Niinistö, Lauri a

a AALTO UNIVERSITY (Finland)

b UNIVERSITY OF HELSINKI (Finland)

Author keywords

Diketonate; ALE deposition; Thin film; Yttrium oxide

Indexed keywords

EID: 0002885089 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3862(200101)7:1<44::AID-CVDE44>3.0.CO;2-Q Document Type: Article

Times cited : (111)

References (48)

1
- 0039612131
- G. Atanassov, R. Thielsch, D. Popov, Thin Solid Films 1985, 223, 228.
- (1985) Thin Solid Films , vol.223 , pp. 228
- Atanassov, G.¹ Thielsch, R.² Popov, D.³

2
- 0039883163
- Swarnalatha M., A. F. Stewart, A. H. Guenther, C. K. Carniglia, Appl. Phys. A - Mater. Sci. Process. 1992, 54, 533.
- (1992) Appl. Phys. A - Mater. Sci. Process. , vol.54 , pp. 533
- Swarnalatha, M.¹ Stewart, A.F.² Guenther, A.H.³ Carniglia, C.K.⁴

3
- 85088080797
- E. Masctti, A. Piegari, A. Tirabassi, SPIE Conf. Proc. 1990, 1270, 125.
- (1990) SPIE Conf. Proc. , vol.1270 , pp. 125
- Masctti, E.¹ Piegari, A.² Tirabassi, A.³

4
- 0002828485
- T. Tsutsumi, Jpn. J. Appl. Phys. 1970, 9, 735.
- (1970) Jpn. J. Appl. Phys. , vol.9 , pp. 735
- Tsutsumi, T.¹

5
- 0000827483
- R. N. Sharma, A. C. Rastogi, J. Appl. Phys. 1994, 76, 4215
- (1994) J. Appl. Phys. , vol.76 , pp. 4215
- Sharma, R.N.¹ Rastogi, A.C.²

6
- 0027668706
- M. Leskelä, H. Mölsä, L. Niinistö, Supercond. Sci. Technol. 1993, 6, 627.
- (1993) Supercond. Sci. Technol. , vol.6 , pp. 627
- Leskelä, M.¹ Mölsä, H.² Niinistö, L.³

7
- 0031119217
- J. P. Senateur, F. Felten, S. Pignard, F. Weiss, A. Abrutis, V. Bigelyte, A. Teiserskis, Z. Saltyte, B. Vengalis, J. Alloys Compd. 1997, 251, 288.
- (1997) J. Alloys Compd. , vol.251 , pp. 288
- Senateur, J.P.¹ Felten, F.² Pignard, S.³ Weiss, F.⁴ Abrutis, A.⁵ Bigelyte, V.⁶ Teiserskis, A.⁷ Saltyte, Z.⁸ Vengalis, B.⁹

8
- 0031120996
- L. Klippe, G. Wahl, J. Alloys Compd. 1997, 251, 249.
- (1997) J. Alloys Compd. , vol.251 , pp. 249
- Klippe, L.¹ Wahl, G.²

9
- 0033534982
- C. Dubordieu, S. B. Kang, Y. Q. Li, G. Kulesha, B. Gallois, Thin Solid Films 1999, 339, 165.
- (1999) Thin Solid Films , vol.339 , pp. 165
- Dubordieu, C.¹ Kang, S.B.² Li, Y.Q.³ Kulesha, G.⁴ Gallois, B.⁵

10
- 0032204048
- T. Matsuzaki, N. Okuda, K. Shinozaki, N. Mizutani, H. Funakubo, Jpn. J. Appl. Phys. 1998, 37, 6229.
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 6229
- Matsuzaki, T.¹ Okuda, N.² Shinozaki, K.³ Mizutani, N.⁴ Funakubo, H.⁵

11
- 0029544424
- G. Garcia, J. Casado, J. Llibre, A. Figueras, J. Cryst. Growth 1995, 156. 426.
- (1995) J. Cryst. Growth , vol.156 , pp. 426
- Garcia, G.¹ Casado, J.² Llibre, J.³ Figueras, A.⁴

12
- 0032203537
- J. McKittrick, G. A. Hirata, C. F. Bacalski, R. Sze, J. Mourant, K. M. Hubbard, S. Pattilo, K. V. Salazar, M. Trkula, T. R. Gosnell, J. Mater. Res. 1998, 13, 3019.
- (1998) J. Mater. Res. , vol.13 , pp. 3019
- McKittrick, J.¹ Hirata, G.A.² Bacalski, C.F.³ Sze, R.⁴ Mourant, J.⁵ Hubbard, K.M.⁶ Pattilo, S.⁷ Salazar, K.V.⁸ Trkula, M.⁹ Gosnell, T.R.¹⁰

13
- 0031547447
- G. A. Hirata, J. McKittrick, M. Avalos-Borja, J. M. Siqueiros, D. Devlin, Appl. Surf. Sci. 1997, 113/114, 509.
- (1997) Appl. Surf. Sci. , vol.113-114 , pp. 509
- Hirata, G.A.¹ McKittrick, J.² Avalos-Borja, M.³ Siqueiros, J.M.⁴ Devlin, D.⁵

14
- 0032632185
- V. N. Moorthy, S. Dhara, A. C. Rastogi, B. K. Das, D. V. S. Jain, J. Mater. Res. 1999, 14, 1865.
- (1999) J. Mater. Res. , vol.14 , pp. 1865
- Moorthy, V.N.¹ Dhara, S.² Rastogi, A.C.³ Das, B.K.⁴ Jain, D.V.S.⁵

15
- 0039919719
- S. Dhara, A. C. Rastogi, B. K. Das, J. Appl. Phys. 1996, 79, 953.
- (1996) J. Appl. Phys. , vol.79 , pp. 953
- Dhara, S.¹ Rastogi, A.C.² Das, B.K.³

16
- 0028763862
- G. R. Bai, H. L. M. Chang, C. M. Foster, Appl. Phys. Lett. 1994, 64, 1777.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1777
- Bai, G.R.¹ Chang, H.L.M.² Foster, C.M.³

17
- 0040798035
- M. Pan, G. Y. Meng, C. S. Chen, D. K. Peng, Y. S. Lin, Mater. Lett. 1998, 36, 36.
- (1998) Mater. Lett. , vol.36 , pp. 36
- Pan, M.¹ Meng, G.Y.² Chen, C.S.³ Peng, D.K.⁴ Lin, Y.S.⁵

18
- 0032122164
- M. Pan, G. Y. Meng, H. W. Xin, C. S. Chen, D. K. Peng, Y. S. Lin, Thin Solid Films 1998, 324, 89.
- (1998) Thin Solid Films , vol.324 , pp. 89
- Pan, M.¹ Meng, G.Y.² Xin, H.W.³ Chen, C.S.⁴ Peng, D.K.⁵ Lin, Y.S.⁶

19
- 0040798031
- S. Oda, M. Kobayashi, H. Zama, Physica C 1994, 235, 979.
- (1994) Physica C , vol.235 , pp. 979
- Oda, S.¹ Kobayashi, M.² Zama, H.³

20
- 0030827059
- Y. Zhang, S. W.-K. Choi, R. J. Puddephatt, J. Am. Chem. Soc. 1997, 119, 9295.
- (1997) J. Am. Chem. Soc. , vol.119 , pp. 9295
- Zhang, Y.¹ Choi, S.W.-K.² Puddephatt, R.J.³

21
- 0000705930
- Y. Zhang, R. J. Puddephatt, Chem. Mater. 1999, 11, 148.
- (1999) Chem. Mater. , vol.11 , pp. 148
- Zhang, Y.¹ Puddephatt, R.J.²

22
- 0028342278
- Z. Yuan, R. J. Puddephatt, Adv. Mat. 1994, 6, 51.
- (1994) Adv. Mat. , vol.6 , pp. 51
- Yuan, Z.¹ Puddephatt, R.J.²

23
- 0031123240
- D. J. Otway, B. Obi, W. S. Rees Jr., J. Alloys Compd. 1997, 251, 254.
- (1997) J. Alloys Compd. , vol.251 , pp. 254
- Otway, D.J.¹ Obi, B.² Rees W.S., Jr.³

24
- 0026897387
- E. Sipp, F. Langlais, R. Naslain, J. Alloys Compd. 1992, 186, 77.
- (1992) J. Alloys Compd. , vol.186 , pp. 77
- Sipp, E.¹ Langlais, F.² Naslain, R.³

25
- 0006455636
- M. Ottosson, T. Andersson, J.-O. Carlsson, A. Hårsta, U. Jansson, P. Norling, K. Niskanen, P. Norblad, Appl. Phys. Lett. 1989, 54, 2476.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 2476
- Ottosson, M.¹ Andersson, T.² Carlsson, J.-O.³ Hårsta, A.⁴ Jansson, U.⁵ Norling, P.⁶ Niskanen, K.⁷ Norblad, P.⁸

26
- 0028054596
- M. L. Hitchman, S. H. Shamlian, D. D. Gilliland, D. J. Cole-Hamilton, S. C. Thompson, S. L. Cook, B. C. Richards, Mat. Res. Soc. Symp. Proc. 1994, 335, 249.
- (1994) Mat. Res. Soc. Symp. Proc. , vol.335 , pp. 249
- Hitchman, M.L.¹ Shamlian, S.H.² Gilliland, D.D.³ Cole-Hamilton, D.J.⁴ Thompson, S.C.⁵ Cook, S.L.⁶ Richards, B.C.⁷

27
- 0026882915
- A. F. Bykov, P. P. Semyannikov, I. K. Igumenov, J. Therm. Anal 1992, 38, 1477.
- (1992) J. Therm. Anal , vol.38 , pp. 1477
- Bykov, A.F.¹ Semyannikov, P.P.² Igumenov, I.K.³

28
- 0031120001
- M. L. Hitchmann, S. H. Shamlian, G. G. Condorelli, F. Chabert-Rocabois, J. Alloys Compd. 1997, 251, 297.
- (1997) J. Alloys Compd. , vol.251 , pp. 297
- Hitchmann, M.L.¹ Shamlian, S.H.² Condorelli, G.G.³ Chabert-Rocabois, F.⁴

29
- 0001013127
- G. V. Girichev, N. I. Giricheva, N. V. Belova, A. R. Kaul', N. P. Kuz'mina, O. Yu. Gorbenko, Russ. J. Inorg. Chem. 1993, 38, 342.
- (1993) Russ. J. Inorg. Chem. , vol.38 , pp. 342
- Girichev, G.V.¹ Giricheva, N.I.² Belova, N.V.³ Kaul', A.R.⁴ Kuz'mina, N.P.⁵ Gorbenko, O.Yu.⁶

30
- 0027963740
- H. A. Meinema, K. Timmer, H. L. Linden , C. I. M. A. Spee, Mater. Res. Soc. Symp. Proc. 1994, 335, 193.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.335 , pp. 193
- Meinema, H.A.¹ Timmer, K.² Linden, H.L.³ Spee, C.I.M.A.⁴

31
- 0040203807
- US Patent 5 837 321, 1998
- K. Timmer, C. Spee, S. L. Cook, US Patent 5 837 321, 1998.
- Timmer, K.¹ Spee, C.² Cook, S.L.³

32
- 0041822817
- L. Niinistö, M. Ritala, M. Leskelä, Mater. Sci. Eng. B 1996, 41, 23.
- (1996) Mater. Sci. Eng. B , vol.41 , pp. 23
- Niinistö, L.¹ Ritala, M.² Leskelä, M.³

33
- 0001027439
- L. Niinistö, Curr. Opin. Solid State Mater. Sci. 1998, 3, 147.
- (1998) Curr. Opin. Solid State Mater. Sci. , vol.3 , pp. 147
- Niinistö, L.¹

34
- 0028543278
- H. Mölsä, L. Niinistö, M. Utriainen, Adv. Mater. Opt. Electron. 1994, 4, 389.
- (1994) Adv. Mater. Opt. Electron. , vol.4 , pp. 389
- Mölsä, H.¹ Niinistö, L.² Utriainen, M.³

35
- 0039612130
- M.Sc. Thesis, Department of Chemical Technology, Helsinki University of Technology, Espoo
- M. Jussila, M.Sc. Thesis, Department of Chemical Technology, Helsinki University of Technology, Espoo 1999.
- (1999)
- Jussila, M.¹

36
- 0039560613
- K. J. Eisentraut, R. E. Sievers, J. Am. Chem. Soc. 1965, 87, 5254.
- (1965) J. Am. Chem. Soc. , vol.87 , pp. 5254
- Eisentraut, K.J.¹ Sievers, R.E.²

37
- 0000646519
- M. Ritala, M. Leskelä, L. Niinistö, P. Haussalo, Chem. Mater. 1993, 5, 1174.
- (1993) Chem. Mater. , vol.5 , pp. 1174
- Ritala, M.¹ Leskelä, M.² Niinistö, L.³ Haussalo, P.⁴

38
- 0002229170
- M. Nieminen, L. Niinistö, E. Rauhala, J. Mater. Chem. 1996, 6, 27.
- (1996) J. Mater. Chem. , vol.6 , pp. 27
- Nieminen, M.¹ Niinistö, L.² Rauhala, E.³

39
- 0040203806
- unpublished
- M. Nieminen, M. Putkonen, L. Niinistö, unpublished.
- Nieminen, M.¹ Putkonen, M.² Niinistö, L.³

40
- 0000496989
- G. S. Girolami, P. M. Jeffries, L. H. Dubois, J. Am. Chem. Soc. 1993, 115, 1015.
- (1993) J. Am. Chem. Soc. , vol.115 , pp. 1015
- Girolami, G.S.¹ Jeffries, P.M.² Dubois, L.H.³

41
- 4243689575
- S. Tougaard, A. Ignatiev, Surf. Sci. 1983, 129, 355.
- (1983) Surf. Sci. , vol.129 , pp. 355
- Tougaard, S.¹ Ignatiev, A.²

42
- 0039612129
- Helsinki University of Technology internal database, unpublished
- Helsinki University of Technology internal database, unpublished.

43
- 0003459529
- Physical Electronics, Eden Prairie, MN
- Handbook of X-ray Photoelectron Spectroscopy (Eds: J. Chastain, R. C. King Jr.), Physical Electronics, Eden Prairie, MN 1995.
- (1995) Handbook of X-ray Photoelectron Spectroscopy
- Chastain, J.¹ King R.C., Jr.²

44
- 0002264906
- M. Leskelä, L. Niinistö, E. Nykänen, P. Soininen, M. Tiitta, Thermochim. Acta 1995, 175, 91.
- (1995) Thermochim. Acta , vol.175 , pp. 91
- Leskelä, M.¹ Niinistö, L.² Nykänen, E.³ Soininen, P.⁴ Tiitta, M.⁵

45
- 0027659199
- M. Ylilammi, T. Ranta-aho, Thin Solid Films 1993, 252, 56.
- (1993) Thin Solid Films , vol.252 , pp. 56
- Ylilammi, M.¹ Ranta-Aho, T.²

46
- 0030421229
- J. Jokinen, J. Keinonen, P. Tikkanen, A. Kuronen, T. Ahlgren, K. Nordlund, Nucl. Instrum. Methods B 1996, 119, 533.
- (1996) Nucl. Instrum. Methods B , vol.119 , pp. 533
- Jokinen, J.¹ Keinonen, J.² Tikkanen, P.³ Kuronen, A.⁴ Ahlgren, T.⁵ Nordlund, K.⁶

47
- 0344577134
- B. Klingenberg, M. A. Vannice, Chem. Mater. 1996, 8, 2755.
- (1996) Chem. Mater. , vol.8 , pp. 2755
- Klingenberg, B.¹ Vannice, M.A.²

48
- 0003436212
- Kratos Analytical Ltd, Manchester
- Axis 165 Operating Manual and User's Guide, Kratos Analytical Ltd, Manchester 1995.
- (1995) Axis 165 Operating Manual and User's Guide

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.