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Volumn 76, Issue 2, 2000, Pages 176-178

High-resolution depth profiling in ultrathin Al2O3 films on Si

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[No Author keywords available]

Indexed keywords

EID: 0000162605 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.125694 Document Type: Article

Times cited : (404)

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