SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Materials Chemistry

Volumn 11, Issue 12, 2001, Pages 3141-3147

Zirconia thin films by atomic layer epitaxy. A comparative study on the use of novel precursors with ozone

(2) Putkonen, M a Niinisto L a

a AALTO UNIVERSITY (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; CYCLOPENTADIENE DERIVATIVE; HEPTANE; OZONE; ZIRCONIUM OXIDE;

ARTICLE; COMPARATIVE STUDY; CRYSTAL STRUCTURE; FILM; STOICHIOMETRY; SURFACE PROPERTY; TEMPERATURE DEPENDENCE; X RAY DIFFRACTION;

EID: 0035655349 PISSN: 09599428 EISSN: None Source Type: Journal
DOI: 10.1039/b105272c Document Type: Article

Times cited : (86)

References (76)

1
- 0020543402
- (1983) Appl. Opt. , vol.22 , pp. 178
- Martin, P.J.¹ Macleod, H.A.² Netterfield, R.P.³ Pacey, C.G.⁴ Sainty, W.G.⁵

2
- 4244135011
- (1995) J. Phys. IV , vol.C5
- Deschanvres, J.L.¹ Vaca, J.M.² Joubert, J.C.³

3
- 0030565105
- (1996) Nucl. Instrum. Methods Phys. Res. Sect. B , vol.118 , pp. 630
- Aslanoglou, X.¹ Assimakopoulos, P.A.² Trapalis, C.³ Kordas, G.⁴ Karakassides, M.A.⁵ Pilakouta, M.⁶

4
- 0032116467
- (1998) Electron. Lett. , vol.34 , pp. 1527
- Craciun, V.¹ Craciun, D.² Boyd, I.W.³

5
- 4243533531
- (1995) J. Phys. IV , vol.C5
- Grafov, A.¹ Mazurenko, E.² Battiston, G.A.³ Zanella, P.⁴

6
- 0017699936
- (1977) Thin Solid Films , vol.47 , pp. 109
- Balog, M.¹ Schieber, M.² Michman, M.³ Patai, S.⁴

7
- 84984148205
- (1995) Adv. Mater. Opt. Electron. , vol.5 , pp. 163
- Treichel, H.¹ Mitwalsky, A.² Tempel, G.³ Zorn, G.⁴ Bohling, D.A.⁵ Coyle, K.R.⁶ Felker, B.S.⁷ George, M.⁸ Kern, W.⁹ Lane, A.P.¹⁰ Sandler, N.P.¹¹

8
- 0035872897
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

9
- 0033315071
- (1999) Tech. Dig. Int. Electron Devices Meet. , pp. 149
- Ma, Y.¹ Ono, Y.² Stecker, L.³ Evans, D.R.⁴ Hsu, S.T.⁵

10
- 0032641356
- (1999) Thin Solid Films , vol.341 , pp. 132
- Komatsu, Y.¹ Sato, T.² Ito, S.³ Akashi, K.⁴

11
- 0034833153
- (2001) Appl. Surf. Sci. , vol.172 , pp. 260
- Yu, Y.¹ Wang, X.² Cao, Y.³ Hu, X.⁴

12
- 0034215469
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 4153
- Kim, T.¹ Oh, J.² Park, B.³ Hong, K.S.⁴

13
- 0019899726
- (1982) J. Mater. Sci. , vol.17 , pp. 225
- Lange, F.F.¹

14
- 84918657980
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 1671
- Farabaugh, E.N.¹ Feldman, A.² Sun, J.³ Sun, Y.N.⁴

15
- 0031371898
- (1997) J. Mater. Res. , vol.12 , pp. 3260
- Tcheliebou, F.¹ Boulouz, M.² Boyer, A.³

16
- 0000635602
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 2344
- Quadri, S.B.¹ Skelton, E.F.² Harford, M.³ Lubitz, P.⁴ Aprigliano, L.⁵

17
- 0032072310
- (1998) Appl. Surf. Sci. , vol.127-129 , pp. 544
- Hanus, F.¹ Laude, L.D.²

18
- 0031170083
- (1997) Mater. Lett. , vol.31 , pp. 345
- Maggio, R.D.¹ Tomasi, A.² Scardi, P.³

19
- 0032664033
- (1999) Appl. Surf. Sci. , vol.142 , pp. 159
- Galtayries, A.¹ Crucifix, M.² Blanchard, G.³ Terwagne, G.⁴ Sporken, R.⁵

20
- 0033900469
- (2000) J. Cryst. Growth , vol.209 , pp. 828
- Khodan, A.N.¹ Contour, J.-P.² Michel, D.³ Durand, O.⁴ Lyonnet, R.⁵ Mihet, M.⁶

21
- 0032026203
- (1998) Surf. Coat. Technol. , vol.100-101 , pp. 94
- Qadri, S.B.¹ Khan, H.R.² Skelton, E.F.³ Lubitz, P.⁴

22
- 0030400863
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 166
- Nazeri, A.¹ Qadri, S.B.²

23
- 0000210410
- (1986) J. Cryst. Growth , vol.74 , pp. 409
- Takahashi, Y.¹ Kawae, T.² Nasu, M.³

24
- 0029544424
- (1995) J. Gryst. Growth. , vol.156 , pp. 426
- Garcia, G.¹ Casado, J.² Llibre, J.³ Figueras, A.⁴

25
- 0033534982
- (1999) Thin Solid Films , vol.339 , pp. 165
- Dubordieu, C.¹ Kang, S.B.² Li, Y.Q.³ Kulesha, G.⁴ Gallois, B.⁵

26
- 0007424565
- submitted
- J. Mater. Chem.
- Putkonen, M.¹ Sajavaara, T.² Niinistö, J.³ Johansson, L.-S.⁴ Niinistö, L.⁵

27
- 0029290460
- (1995) Mater. Sci. Eng. , vol.R14 , pp. 157
- Qiao, J.¹ Yang, C.Y.²

28
- 0032757508
- (1999) Thin Solid Films , vol.338 , pp. 224
- Tian, Y.J.¹ Linzen, S.² Schmidl, F.³ Matthes, A.⁴ Schneidewind, H.⁵ Seidel, P.⁶

29
- 0026939503
- (1992) Physica C , vol.201 , pp. 249
- Prusseit, W.¹ Corsépius, S.² Zwerger, M.³ Berberich, P.⁴ Kinder, H.⁵ Eibl, O.⁶ Jaekel, C.⁷ Breuer, U.⁸ Kurz, H.⁹

30
- 0032048371
- (1998) Thin Solid Films , vol.317 , pp. 241
- Garcia, G.¹ Figueras, A.² Casado, J.³ Llibre, J.⁴ Mokchah, M.⁵ Petot-Ervas, G.⁶ Calderer, J.⁷

31
- 0032158294
- (1998) Thin Solid Films , vol.330 , pp. 59
- Tan, G.-L.¹ Wu, X.-J.²

32
- 0031187407
- (1997) Thin Solid Films , vol.304 , pp. 106
- Chour, K.-W.¹ Chen, J.² Xu, R.³

33
- 0030678195
- (1997) Solid State Ionics , vol.93 , pp. 263
- Han, J.¹ Xomeritakis, G.² Lin, Y.S.³

34
- 0032628456
- (1999) Appl. Surf. Sci. , vol.142 , pp. 418
- Lin, C.-H.¹ Hsu, W.-D.² Lin, I.-N.³

35
- 0030360859
- (1996) Proc. IEEE Int. Symp. Appl. Ferroelectr. , pp. 45
- Shiosaki, T.¹ Fujisawa, H.² Shimizu, M.³

36
- 35348846979
- (1989) Science , vol.246 , pp. 1400
- Scott, J.F.¹ Paz De Araujo, C.A.²

37
- 0007387387
- US Pat., 4413022, 1983
- Suntola, T.S.¹ Pakkala, A.J.² Lindfors, S.G.³

38
- 0041822817
- (1996) Mater. Sci. Eng. B , vol.41 , pp. 23
- Niinistö, L.¹ Ritala, M.² Leskelä, M.³

39
- 0001027439
- (1998) Curr. Opin. Solid State Mater. Sci. , vol.3 , pp. 147
- Niinistö, L.¹

40
- 0034452746
- (2000) Proc. Int. Semicond Conf. , pp. 33
- Niinistö, L.¹

41
- 4243658046
- ed. D. A. Glocker and S. I. Shah, Institute of Physics, Bristol
- (1995) Handbook of Thin Film Process Technology
- Suntola, T.¹

42
- 0028758883
- (1994) Appl. Surf. Sci. , vol.75 , pp. 333
- Ritala, M.¹ Leskelä, M.²

43
- 0001140789
- (2000) Chem. Vap. Deposit. , vol.6 , pp. 297
- Kukli, K.¹ Ritala, M.² Leskelä, M.³

44
- 0000020022
- (2000) Appl. Phys. Lett. , vol.76 , pp. 436
- Copel, M.¹ Gribelyuk, M.² Gusev, E.³

45
- 0001732385
- (2000) Proc. Electrochem. Soc. , vol.2 , pp. 477
- Gusev, E.P.¹ Copel, M.² Cartier, E.³ Buchanan, D.⁴ Okorn-Schmidt, H.⁵ Gribelyuk, M.⁶ Falcon, D.⁷ Murphy, R.⁸ Molis, S.⁹ Baumvol, I.J.R.¹⁰ Krug, C.¹¹ Jussila, M.¹² Tuominen, M.¹³ Haukka, S.¹⁴

46
- 0001277844
- (1997) Langmuir , vol.13 , pp. 2717
- Kytökivi, A.¹ Lakomaa, E.-L.² Root, A.³ Österholm, H.⁴ Jacobs, J.-P.⁵ Brongersma, H.H.⁶

47
- 4244208226
- in press
- Appl. Surf. Sci.
- Kröger-Laukkanen, M.¹ Peussa, M.² Leskelä, M.³ Niinistö, L.⁴

48
- 0031153011
- (1997) Thin Solid Films , vol.301 , pp. 35
- Gavillet, J.¹ Belmonte, T.² Hertz, D.³ Michel, H.⁴

49
- 0001076153
- (1998) Chem. Vap. Deposit. , vol.4 , pp. 220
- Colombo, D.G.¹ Gilmer, D.C.² Young V.G., Jr.³ Campbell, S.A.⁴ Gladfelter, W.L.⁵

50
- 0028464592
- (1994) J. Mater. Res. , vol.9 , pp. 1721
- Si, J.¹ Desu, S.B.² Tsai, C.-Y.³

51
- 0032656081
- (1999) Thin Solid Films , vol.348 , pp. 90
- Cameron, M.A.¹ George, S.M.²

52
- 10444259815
- (2000) Chem. Vap. Deposit. , vol.6 , pp. 21
- Gallegos III, J.J.¹ Ward, T.L.² Boyle, T.J.³ Rodriguez, M.A.⁴ Francisco, L.P.⁵

53
- 0000095505
- (1998) Chem. Vap. Deposit. , vol.4 , pp. 197
- Jones, A.C.¹ Leedham, T.J.² Wright, P.J.³ Crosbie, M.J.⁴ Williams, D.J.⁵ Fleeting, K.A.⁶ Davies, H.O.⁷ Otway, D.J.⁸ O'Brien, P.⁹

54
- 0000395209
- (1999) Chem. Vap. Deposit. , vol.5 , pp. 151
- Morstein, M.¹ Pozsgai, I.² Spencer, N.D.³

55
- 0000065522
- (1999) Inorg. Chem. , vol.38 , pp. 125
- Morstein, M.¹

56
- 0003106594
- (1995) J. Phys. IV , vol.C5
- Bastianini, A.¹ Battiston, G.A.² Gerbasi, R.³ Porchia, M.⁴ Daolio, S.⁵

57
- 0001041541
- (1999) Chem. Vap. Deposit. , vol.5 , pp. 159
- Codato, S.¹ Carta, G.² Rossetto, G.³ Rizzi, G.A.⁴ Zanella, P.⁵ Scardi, P.⁶ Leoni, M.⁷

58
- 0000762907
- (1995) Zh. Obshch. Khim. , vol.65 , pp. 1057
- Dyagileva, L.M.¹ Tsyganova, E.I.²

59
- 0007460042
- (1995) Russ. J. Gen. Chem. (Engl. Transl.) , vol.65 , pp. 963
- Dyagileva, L.M.¹ Tsyganova, E.I.²

60
- 0342520837
- (1999) J. Phys. IV , vol.9
- Leskelä, M.¹ Ritala, M.²

61
- 0030566216
- (1996) Appl. Surf. Sci. , vol.107 , pp. 128
- Ott, A.W.¹ McCarley, K.C.² Klaus, J.W.³ Way, J.D.⁴ George, S.M.⁵

62
- 0033847492
- (2000) J. Mater. Chem. , vol.10 , pp. 1857
- Putkonen, M.¹ Sajavaara, T.² Niinistö, L.³

63
- 0032594211
- (1999) Electrochem. Solid State Lett. , vol.2 , pp. 504
- Vehkamäki, M.¹ Hatanpää, T.² Hänninen, T.³ Ritala, M.⁴ Leskelä, M.⁵

64
- 33947087732
- (1973) J. Am. Chem. Soc. , vol.95 , pp. 6263
- Samuel, E.¹ Rausch, M.D.²

65
- 0000091752
- (1989) Zh. Neorg. Khim. , vol.34 , pp. 1193
- Morozova, N.B.¹ Igumenov, I.K.² Mit'kin, V.N.³ Kradenov, K.V.⁴ Potapova, O.G.⁵ Lazarev, V.B.⁶ Grinberg, Ya.Kh.⁷

66
- 0007457695
- (1995) Russ. J. Inorg. Chem. (Engl. Transl.) , vol.65 , pp. 963
- Morozova, N.B.¹ Igumenov, I.K.² Mit'kin, V.N.³ Kradenov, K.V.⁴ Potapova, O.G.⁵ Lazarev, V.B.⁶ Grinberg, Ya.Kh.⁷

67
- 0002264906
- (1991) Thermochim. Acta , vol.175 , pp. 91
- Leskelä, M.¹ Niinistö, L.² Nykänen, E.³ Soininen, P.⁴ Tiitta, M.⁵

68
- 0027659199
- (1993) Thin Solid Films , vol.232 , pp. 56
- Ylilammi, M.¹ Ranta-aho, T.²

69
- 0004329596
- Omega Data Systems, Veldhoven, Netherlands
- (1994) UniQuant Version 2 User Manual

70
- 0030421229
- (1996) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.119 , pp. 533
- Jokinen, J.¹ Keinonen, J.² Tikkanen, P.³ Kuronen, A.⁴ Ahlgren, T.⁵ Nordlund, K.⁶

71
- 0002885089
- (2001) Chem. Vap. Deposit. , vol.7 , pp. 44
- Putkonen, M.¹ Sajavaara, T.² Johansson, L.-S.³ Niinistö, L.⁴

72
- 0035897237
- (2001) Appl. Surf. Sci. , vol.174 , pp. 155
- Nieminen, M.¹ Putkonen, M.² Niinistö, L.³

73
- 0033480225
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 14
- Wisotzki, E.¹ Balogh, A.G.² Hahn, H.³ Wolan, J.T.⁴ Hoflund, G.B.⁵

74
- 0022186045
- (1985) J. Am. Ceram. Soc. , vol.68
- Suyama, R.¹ Ashida, T.² Kume, S.³

75
- 0029264144
- (1995) J. Cryst. Growth , vol.148 , pp. 268
- Aarik, J.¹ Aidla, A.² Uustare, T.³ Sammelselg, V.⁴

76
- 0032653080
- (1999) Thin Solid Films , vol.340 , pp. 110
- Aarik, J.¹ Aidla, A.² Kiisler, A.-A.³ Uustare, T.⁴ Sammelselg, V.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.