Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

Thin Solid Films

Volumn 305, Issue 1-2, 1997, Pages 270-273

  Aarik, Jaan ^a   Aidla, Aleks ^a   Kiisler, Alma Asta ^a   Uustare, Teet ^a   Sammelselg, Väino ^b  

^a UNIVERSITY OF TARTU   (Estonia)

^b INSTITUTE OF PHYSICS   (Estonia)

Author keywords

Optical properties; Structural properties; Titanium oxide

Indexed keywords

CRYSTAL ORIENTATION; FILM GROWTH; REFRACTIVE INDEX; THIN FILMS; TITANIUM DIOXIDE;

ATOMIC LAYER DEPOSITION;

AMORPHOUS FILMS;

EID: 0031213381     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00135-1     Document Type: Article

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