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Journal of the Electrochemical Society

Volumn 148, Issue 12, 2001, Pages

Dielectric Properties of Zirconium Oxide Grown by Atomic Layer Deposition from Iodide Precursor

(6) Kukli, Kaupo a,b Forsgren, Katarina c Ritala, Mikko b Leskelä, Markku b Aarik, Jaan a Hårsta, Anders c

a UNIVERSITY OF TARTU (Estonia)

b UNIVERSITY OF HELSINKI (Finland)

c UPPSALA UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000127529 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1418379 Document Type: Article

Times cited : (53)

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