Growth of LaCoO 3 thin films from β-diketonate precursors

Applied Surface Science

Volumn 112, Issue , 1997, Pages 243-250

  Seim, Helene ^a,b   Nieminen, Minna ^a   Niinistö, Lauri ^a   Fjellvåg, Helmer ^b   Johansson, Leena Sisko ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF OSLO   (Norway)

Author keywords

Atomic layer epitaxy; Cobalt oxide; Lanthanum cobalt oxide; Lanthanum oxide; Thin films; diketonate

Indexed keywords

COBALT COMPOUNDS; DEPOSITION; EPITAXIAL GROWTH; GLASS; LANTHANUM COMPOUNDS; OXIDES; OZONE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC LAYER EPITAXY; DIKETONATE; LANTHANUM COBALT OXIDE; PROFILOMETRY; SODA LIME;

FILM GROWTH;

EID: 0031546820     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)01001-X     Document Type: Article

References (23)

1. T. Nakamura, M. Misono and Y. Yoneda, J. Catal. 83 (1983) 151.
2. N.Q. Minh, J. Am. Ceram. Soc. 76 (1993) 536.
3. L.G. Tejuca and J.L.G. Fierro, eds., Properties and Applications of Perovskite-Type Oxides (Marcel Dekker, 1992) ch. 10-17.
4. H. Ichinose, Y. Shiwa and M. Nagano, Jpn. J. Appl. Phys. 33 (1994) 5907.
5. H. Ichinose, H. Katsuki and M. Nagano, J. Cryst. Growth 144 (1994) 59.
6. Y. Matsumoto, T. Sasaki and J. Hombo, Inorg. Chem. 31 (1992) 738.
7. H. Seim, H. Mölsä, M. Nieminen, H. Fjellvåg and L. Niinistö, submitted for publication.
8. K. Uchino, E. Sadanaga and T. Hirose, J. Am. Ceram. Soc. 72 (1985) 1555.
9. T. Suntola, A. Pakkala and S. Lindfors, U.S. Patent 4,389,973, (1983).
10. M. Ylilammi and T. Ranta-aho, Thin Solid Films 232 (1993) 56.
11. J. Saarilahti and E. Rauhala, Nucl. Instrum. Methods Phys. Res. B 64 (1992) 734.
12. E. Rauhala, Nucl. Instrum. Methods Phys. Res. B 12 (1985) 447.
13. M. Luomajärvi, E. Rauhala and M Hautala, Nucl. Instrum. Methods Phys. Res. B 9 (1985) 255.
14. M. Leskelä and L. Niinistö, in: Atomic Layer Epitaxy, eds. T. Suntola and M. Simpson (Blackie and Son Ltd., Glasgow, 1990) p. 1.
15. L. Eyring, in: Handbook on the Physics and Chemistry of Rare Earths, eds. K.A. Gschneidner, Jr. and L. Eyring, Vol. 3 (North-Holland publishing company, 1979) ch. 27.
16. T. Suntola, in: Handbook of Crystal Growth, ed. D.T.J. Hurle, Vol. 3 (Elsevier, Amsterdam, 1994) p. 605.
17. H. Fjellvåg, O.H. Hansteen, B.G. Tilset, A. Olafsen, N. Sakai and H. Seim, Thermochim. Acta 256 (1995) 75.
18. J.L.G. Fierro and L.G. Tejuca, Appl. Surf. Sci. 27 (1987) 453.
19. E.A. Lombardo, K. Tanaka and I. Toyoshima, J. Catal. 80 (1983) 340.
20. K. Tabata, I. Matsumoto and S. Kohiki, J. Mater. Sci. 22 (1987) 1882.
21. L.G. Tejuca, A.T. Bell, J.L.G. Fierro and M.A. Pena, Appl. Surf. Sci. 21 (1988) 301.
22. P. Burroughs, A. Hamnett, A.F. Orchard and G. Thornton, J. Chem. Soc. Dalton Trans. (1976) 1686.
23. L. Niinistö, M. Ritala and M. Leskelä, Mater. Sci. Eng. B, in press.