Growth of SrTiO 3 and BaTiO 3 thin films by atomic layer deposition

Electrochemical and Solid-State Letters

Volumn 2, Issue 10, 1999, Pages 504-506

  Vehkamäki, Marko ^a   Hatanpää, Timo ^a   Hänninen, Timo ^a   Ritala, Mikko ^a,b   Leskelä, Markku ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

^b ELECTROCHEMICAL SOCIETY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; STRONTIUM TITANATE;

ANNEALING; BARIUM TITANATE; CONFORMATIONS; DEPOSITION; FILM GROWTH; PERMITTIVITY MEASUREMENT; STRONTIUM COMPOUNDS;

DIELECTRIC FILMS;

EID: 0032594211     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1390884     Document Type: Article

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