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Applied Surface Science

Volumn 174, Issue 2, 2001, Pages 155-166

Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

(3) Nieminen, Minna a Putkonen, Matti a Niinistö, Lauri a

a AALTO UNIVERSITY (Finland)

Author keywords

ALE deposition; Lanthanum oxide; Thin film; Diketonate

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; EPITAXIAL GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLASS; MORPHOLOGY; OXIDES; OZONE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY CRYSTALLOGRAPHY;

DIKETONATE;

LANTHANUM COMPOUNDS;

EID: 0035897237 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(01)00149-0 Document Type: Article

Times cited : (202)

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