Tailoring the dielectric properties of HfO2-Ta2O5 nanolaminates

Applied Physics Letters

Volumn 68, Issue 26, 1996, Pages 3737-3739

  Kukli, Kaupo ^a   Ihanus, Jarkko ^a   Ritala, Mikko ^a   Leskela, Markku ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0348067304     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115990     Document Type: Article

References (17)

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