Integrating MEMS and ICs

Microsystems and Nanoengineering

Volumn 1, Issue , 2015, Pages

  Fischer, Andreas C ^a   Forsberg, Fredrik ^a   Lapisa, Martin ^a   Bleiker, Simon J ^a   Stemme, Göran ^a   Roxhed, Niclas ^a   Niklaus, Frank ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Cofabrication platforms; Integrated circuits (ICs); Microelectromechanical system (MEMS); More Than Moore; Multi chip modules (MCMs); System in package (SiP); System on chip (SoC); Three dimensional (3D) heterogeneous integration

Indexed keywords

EID: 85045082677     PISSN: None     EISSN: 20557434     Source Type: Journal    
DOI: 10.1038/micronano.2015.5     Document Type: Review

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