High fill-factor two-axis gimbaled tip-tilt-piston micromirror array actuated by self-aligned vertical electrostatic combdrives

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 563-571

  Jung, Il Woong ^a   Krishnamoorthy, Uma ^a   Solgaard, Olav ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

High fill factor; Micro opticalelectromechanical systems (MOEMS); Microelectromechanical systems (MEMS); Micromirror array; Self alignment; Silicon on insulator (SOI); Tip tilt piston actuator; Vertical combdrives

Indexed keywords

ASPECT RATIO; DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL SYSTEMS; SILICON ON INSULATOR TECHNOLOGY;

ELECTROSTATIC COMBDRIVES; HIGH FILL-FACTOR; MICRO-OPTICALELECTROMECHANICAL SYSTEMS (MOEMS); MICROMIRROR ARRAY; TIP-TILT-PISTON ACTUATOR; VERTICAL COMBDRIVES;

MIRRORS;

EID: 33745177772     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876666     Document Type: Article

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