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Volumn 23, Issue 8, 2013, Pages

Unconventional applications of wire bonding create opportunities for microsystem integration

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL INTERCONNECTIONS; ENERGY HARVESTER; PLACEMENT ACCURACY; PLASTIC FIBERS; SEMICONDUCTOR CHIPS; SHAPE MEMORY ALLOY ACTUATORS; THROUGH SILICON VIAS; VERSATILE TOOLS;

EID: 84881141946     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/8/083001     Document Type: Review
Times cited : (55)

References (159)
  • 2
    • 62549163790 scopus 로고    scopus 로고
    • In situ studies of the effect of ultrasound during deformation on residual hardness of a metal
    • 10.1007/s11664-009-0732-4 0361-5235
    • Lum I, Hang C J, Mayer M and Zhou Y 2009 In situ studies of the effect of ultrasound during deformation on residual hardness of a metal J. Electron. Mater. 38 647-54
    • (2009) J. Electron. Mater. , vol.38 , Issue.5 , pp. 647-654
    • Lum, I.1    Hang, C.J.2    Mayer, M.3    Zhou, Y.4
  • 4
    • 52949130618 scopus 로고    scopus 로고
    • Investigation of ultrasonic copper wire wedge bonding on Au/Ni plated Cu substrates at ambient temperature
    • 10.1016/j.jmatprotec.2007.12.134 0924-0136
    • Tian Y, Wang C, Lum I, Mayer M, Jung J and Zhou Y 2008 Investigation of ultrasonic copper wire wedge bonding on Au/Ni plated Cu substrates at ambient temperature J. Mater. Process. Technol. 208 179-86
    • (2008) J. Mater. Process. Technol. , vol.208 , Issue.1-3 , pp. 179-186
    • Tian, Y.1    Wang, C.2    Lum, I.3    Mayer, M.4    Jung, J.5    Zhou, Y.6
  • 6
    • 4944227231 scopus 로고    scopus 로고
    • Stud bumping and die attach for expanded flip chip applications
    • 1065-0555
    • McTaggart V, Levine L and Dunn G 2004 Stud bumping and die attach for expanded flip chip applications Adv. Packag. 13 30
    • (2004) Adv. Packag. , vol.13 , pp. 30
    • McTaggart, V.1    Levine, L.2    Dunn, G.3
  • 8
    • 84881157125 scopus 로고    scopus 로고
    • Stud bumping serves as TSV alternative for BSI image sensor in latest iPhone 4
    • Baron J et al 2010 Stud bumping serves as TSV alternative for BSI image sensor in latest iPhone 4 3D Packaging Magazine pp 8-9
    • (2010) 3D Packaging Magazine , pp. 8-9
    • Baron, J.1
  • 9
    • 39449124367 scopus 로고    scopus 로고
    • Growth behavior of Cu/Al intermetallic compounds and cracks in copper ball bonds during isothermal aging
    • DOI 10.1016/j.microrel.2007.06.008, PII S0026271407002466
    • Hang C, Wang C, Mayer M, Tian Y, Zhou Y and Wang H 2008 Growth behavior of Cu/Al intermetallic compounds and cracks in copper ball bonds during isothermal aging Microelectron. Reliab. 48 416-24 (Pubitemid 351274114)
    • (2008) Microelectronics Reliability , vol.48 , Issue.3 , pp. 416-424
    • Hang, C.J.1    Wang, C.Q.2    Mayer, M.3    Tian, Y.H.4    Zhou, Y.5    Wang, H.H.6
  • 11
    • 78651420042 scopus 로고    scopus 로고
    • Influence of gold pick up on the hardness of copper free air ball
    • 10.1016/j.microrel.2010.03.014 0026-2714
    • Lee J, Mayer M, Zhou Y, Moon J and Persic J 2011 Influence of gold pick up on the hardness of copper free air ball Microelectron. Reliab. 51 30-37
    • (2011) Microelectron. Reliab. , vol.51 , Issue.1 , pp. 30-37
    • Lee, J.1    Mayer, M.2    Zhou, Y.3    Moon, J.4    Persic, J.5
  • 12
    • 78651462585 scopus 로고    scopus 로고
    • Copper wire bonding
    • 10.1016/j.microrel.2010.12.004 0026-2714
    • Mayer M and Lai Y-S 2011 Copper wire bonding Microelectron. Reliab. 51 1-2
    • (2011) Microelectron. Reliab. , vol.51 , Issue.1 , pp. 1-2
    • Mayer, M.1    Lai, Y.-S.2
  • 15
    • 51649150640 scopus 로고
    • Platinum wire wedge bonding: A new IC and microsensor interconnect
    • 10.1007/BF02652107 0361-5235
    • Mantese J and Alcini W 1988 Platinum wire wedge bonding: A new IC and microsensor interconnect J. Electron. Mater. 17 285-9
    • (1988) J. Electron. Mater. , vol.17 , Issue.4 , pp. 285-289
    • Mantese, J.1    Alcini, W.2
  • 16
    • 67349148647 scopus 로고    scopus 로고
    • Development of nickel wire bonding for high-temperature packaging of SiC devices
    • 10.1109/TADVP.2009.2015593 1521-3323
    • Burla R, Chen L, Zorman C and Mehregany M 2009 Development of nickel wire bonding for high-temperature packaging of SiC devices IEEE Trans. Adv. Packag. 32 564-74
    • (2009) IEEE Trans. Adv. Packag. , vol.32 , Issue.2 , pp. 564-574
    • Burla, R.1    Chen, L.2    Zorman, C.3    Mehregany, M.4
  • 19
    • 77955435801 scopus 로고    scopus 로고
    • Development of a wire-bond technology for SiC high temperature applications
    • 10.4028/www.scientific.net/MSF.645-648.749 1662-9752
    • Heuck N, Baars F, Bakin A and Waag A 2010 Development of a wire-bond technology for SiC high temperature applications Mater. Sci. Forum 645-648 749-52
    • (2010) Mater. Sci. Forum , vol.645-648 , pp. 749-752
    • Heuck, N.1    Baars, F.2    Bakin, A.3    Waag, A.4
  • 21
    • 79958768773 scopus 로고    scopus 로고
    • Wire bonding using insulated wire and new challenges in wire bonding
    • 10.1108/13565360810875958 1356-5362
    • Zhong Z 2008 Wire bonding using insulated wire and new challenges in wire bonding Microelectron. Int. 25 9-14
    • (2008) Microelectron. Int. , vol.25 , Issue.2 , pp. 9-14
    • Zhong, Z.1
  • 22
    • 0034171584 scopus 로고    scopus 로고
    • A new approach in free air ball formation process parameters analysis
    • 10.1109/6104.846934 1521-334X
    • Chen J and Lin Y 2002 A new approach in free air ball formation process parameters analysis IEEE Trans. Electron. Packag. Manuf. 23 116-22
    • (2002) IEEE Trans. Electron. Packag. Manuf. , vol.23 , Issue.2 , pp. 116-122
    • Chen, J.1    Lin, Y.2
  • 24
    • 28444476431 scopus 로고    scopus 로고
    • Ball size and HAZ as functions of EFO parameters for gold bonding wire
    • Qin W, Cohen I and Ayyaswamy P 1997 Ball size and HAZ as functions of EFO parameters for gold bonding wire Adv. Electron. Packag. 1 391-8
    • (1997) Adv. Electron. Packag. , vol.1 , pp. 391-398
    • Qin, W.1    Cohen, I.2    Ayyaswamy, P.3
  • 26
    • 0034582657 scopus 로고    scopus 로고
    • Analysis and experiments of ball deformation for ultra-fine-pitch wire bonding
    • 10.1142/S0960313100000204 0960-3131
    • Zhong Z W and Goh K S 2001 Analysis and experiments of ball deformation for ultra-fine-pitch wire bonding J. Electron. Manuf. 10 211-7
    • (2001) J. Electron. Manuf. , vol.10 , Issue.4 , pp. 211-217
    • Zhong, Z.W.1    Goh, K.S.2
  • 27
    • 84881163780 scopus 로고    scopus 로고
    • Optimizing the wire bonding process for 35-μm ultra-fine-pitch packages
    • Chylak B, Komar S and Perlberg G 2001 Optimizing the wire bonding process for 35-μm ultra-fine-pitch packages Proc. Semicon (Singapore) pp A1-A7
    • (2001) Proc. Semicon (Singapore)
    • Chylak, B.1    Komar, S.2    Perlberg, G.3
  • 28
    • 0013014770 scopus 로고    scopus 로고
    • Numerical study of wire bonding - Analysis of interfacial deformation between wire and pad
    • DOI 10.1115/1.1413765
    • Takahashi Y and Inoue M 2002 Numerical study of wire bonding - analysis of interfacial deformation between wire and pad J. Electron. Packag. 124 27-36 (Pubitemid 135692386)
    • (2002) Journal of Electronic Packaging, Transactions of the ASME , vol.124 , Issue.1 , pp. 27-36
    • Takahashi, Y.1    Inoue, M.2
  • 29
    • 10244250286 scopus 로고    scopus 로고
    • Mechanical FEM simulation of bonding process on Cu low k wafers
    • 10.1109/TCAPT.2004.838862 1521-3331
    • Degryse D, Vandefelde B and Beyne E 2004 Mechanical FEM simulation of bonding process on Cu low k wafers IEEE Trans. Compon. Packag. 27 643-50
    • (2004) IEEE Trans. Compon. Packag. , vol.27 , Issue.4 , pp. 643-650
    • Degryse, D.1    Vandefelde, B.2    Beyne, E.3
  • 30
    • 33846786811 scopus 로고    scopus 로고
    • Fundamentals of thermo-sonic copper wire bonding in microelectronics packaging
    • DOI 10.1007/s10853-006-1148-7
    • Murali S, Srikanth N, Wong Y M and Vath C J 2007 Fundamentals of thermo-sonic copper wire bonding in microelectronics packaging J. Mater. Sci. 42 615-23 (Pubitemid 46201661)
    • (2007) Journal of Materials Science , vol.42 , Issue.2 , pp. 615-623
    • Murali, S.1    Srikanth, N.2    Wong, Y.M.3    Vath III, C.J.4
  • 31
    • 34548285314 scopus 로고    scopus 로고
    • Numerical study of gold wire bonding process on Cu/low-k structures
    • DOI 10.1109/TADVP.2006.890213, Special Section on Wafer-Level Packaging
    • Viswanath A, Zhang X, Ganesh V and Chun L 2007 Numerical study of gold wire bonding process on Cu/low-k structures IEEE Trans. Adv. Packag. 30 448-56 (Pubitemid 47315468)
    • (2007) IEEE Transactions on Advanced Packaging , vol.30 , Issue.3 , pp. 448-456
    • Viswanath, A.G.K.1    Zhang, X.2    Ganesh, V.P.3    Chun, L.4
  • 32
    • 39449101774 scopus 로고    scopus 로고
    • Thermosonic wire bonding process simulation and bond pad over active stress analysis
    • DOI 10.1109/TEPM.2007.914232
    • Liu Y, Irving S and Luk T 2008 Thermosonic wire bonding process simulation and bond pad over active stress analysis IEEE Trans. Electron. Packag. Manuf. 31 61-71 (Pubitemid 351266677)
    • (2008) IEEE Transactions on Electronics Packaging Manufacturing , vol.31 , Issue.1 , pp. 61-71
    • Liu, Y.1    Irving, S.2    Luk, T.3
  • 33
    • 84881184624 scopus 로고    scopus 로고
    • ANSYS Inc.
    • ANSYS Inc. (www.ansys.com)
  • 34
    • 84881182402 scopus 로고    scopus 로고
    • Dassault Systèmes
    • Dassault Systèmes www.simulia.com
  • 35
    • 34848865650 scopus 로고    scopus 로고
    • Iterative optimization of tail breaking force of 1 mil wire thermosonic ball bonding processes and the influence of plasma cleaning
    • DOI 10.1016/j.mejo.2007.07.095, PII S0026269207002431
    • Lee J, Mayer M, Zhou Y and Hong S 2007 Iterative optimization of tail breaking force of 1mil wire thermosonic ball bonding processes and the influence of plasma cleaning Microelectron. J. 38 842-7 (Pubitemid 47496057)
    • (2007) Microelectronics Journal , vol.38 , Issue.8-9 , pp. 842-847
    • Lee, J.1    Mayer, M.2    Zhou, Y.3    Hong, S.J.4
  • 36
    • 55849117747 scopus 로고    scopus 로고
    • Tail breaking force in thermosonic wire bonding with novel bonding wires
    • 10.4028/www.scientific.net/MSF.580-582.201 1662-9752
    • Lee J, Mayer M, Zhou Y, Hong S and Lee S M 2008 Tail breaking force in thermosonic wire bonding with novel bonding wires Mater. Sci. Forum 580/582 201-4
    • (2008) Mater. Sci. Forum , vol.580-582 , pp. 201-204
    • Lee, J.1    Mayer, M.2    Zhou, Y.3    Hong, S.4    Lee, S.M.5
  • 37
    • 49549102428 scopus 로고    scopus 로고
    • In situ ultrasonic force signals during low-temperature thermosonic copper wire bonding
    • 10.1016/j.mee.2008.05.035 0167-9317
    • Shah A, Mayer M, Zhou Y, Hong S and Moon J 2008 In situ ultrasonic force signals during low-temperature thermosonic copper wire bonding Microelectron. Eng. 85 1851-7
    • (2008) Microelectron. Eng. , vol.85 , Issue.9 , pp. 1851-1857
    • Shah, A.1    Mayer, M.2    Zhou, Y.3    Hong, S.4    Moon, J.5
  • 38
    • 0035426148 scopus 로고    scopus 로고
    • Simulation procedure to improve piezoresistive microsensors used for monitoring ball bonding
    • DOI 10.1016/S0924-4247(01)00587-8, PII S0924424701005878
    • Osorio R, Mayer M, Schwizer J, Korvink J and Baltes H 2001 Simulation procedure to improve piezoresistive microsensors used for monitoring ball bonding Sensors Actuators A 92 299-304 (Pubitemid 32697910)
    • (2001) Sensors and Actuators, A: Physical , vol.92 , Issue.1-3 , pp. 299-304
    • Osorio, R.1    Mayer, M.2    Schwizer, J.3    Korvink, J.G.4    Baltes, H.5
  • 39
    • 0002905038 scopus 로고    scopus 로고
    • Finite element simulation of wire looping during wirebond fabrication
    • Tay A A O, Seah B C and Ong S H 1998 Finite element simulation of wire looping during wirebond fabrication ASME J. Electron. Packag.
    • (1998) ASME J. Electron. Packag.
    • Tay, A.A.O.1    Seah, B.C.2    Ong, S.H.3
  • 40
    • 84964608590 scopus 로고    scopus 로고
    • Three dimensional finite element simulation of wire looping process in wirebonding
    • Ng B, Tay A and Ong S 2002 Three dimensional finite element simulation of wire looping process in wirebonding 4th Electronics Packaging Technology Conf. pp 334-7
    • (2002) 4th Electronics Packaging Technology Conf. , pp. 334-337
    • Ng, B.1    Tay, A.2    Ong, S.3
  • 41
    • 0038344091 scopus 로고    scopus 로고
    • Dynamic and quasi-static three dimensional simulation of wire-looping process in wirebonding
    • 10.1109/ECTC.2003.1216467
    • Tay A, Ng B and Ong S 2003 Dynamic and quasi-static three dimensional simulation of wire-looping process in wirebonding Proc. 53rd Electronic Components and Technology Conf. vol 27-30 pp 1330-3
    • (2003) Proc. 53rd Electronic Components and Technology Conf. , vol.27-30 , pp. 1330-1333
    • Tay, A.1    Ng, B.2    Ong, S.3
  • 44
    • 0035441294 scopus 로고    scopus 로고
    • Design in triangle-profiles and T-profiles of a wirebond using a linkage-spring model
    • DOI 10.1109/6144.946494, PII S1521333101062055
    • Lo Y-L, Chen T-C and Ho T-L 2001 Design in triangle-profiles and t-profiles of a wirebond using a linkage-spring model IEEE Trans. Compon. Packag. Technol. 24 457-67 (Pubitemid 32981603)
    • (2001) IEEE Transactions on Components and Packaging Technologies , vol.24 , Issue.3 , pp. 457-467
    • Lo, Y.-L.1    Chen, T.-C.2    Ho, T.-L.3
  • 45
    • 0036613725 scopus 로고    scopus 로고
    • Integrated Taguchi method and neural network analysis of physical profiling in the wirebonding process
    • DOI 10.1109/TCAPT.2002.1010017, PII S1521333102047372
    • Lo Y-L and Tsao C 2002 Integrated Taguchi method and neural network analysis of physical profiling in the wirebonding process IEEE Trans. Compon. Packag. Technol. 25 270-7 (Pubitemid 34878765)
    • (2002) IEEE Transactions on Components and Packaging Technologies , vol.25 , Issue.2 , pp. 270-277
    • Lo, Y.-L.1    Tsao, C.C.2
  • 48
    • 0000441512 scopus 로고
    • Wire bond loop profile development for fine pitch-long wire assembly
    • 10.1109/66.311344 0894-6507
    • Groover R, Shu W and Lee S 1994 Wire bond loop profile development for fine pitch-long wire assembly IEEE Trans. Semicond. Manuf. 7 393-9
    • (1994) IEEE Trans. Semicond. Manuf. , vol.7 , Issue.3 , pp. 393-399
    • Groover, R.1    Shu, W.2    Lee, S.3
  • 50
    • 56649111431 scopus 로고    scopus 로고
    • Microelectronic wire bonding with insulated Au wire-effects of process parameters on insulation removal and crescent bonding
    • 10.2320/matertrans.MRA2008087 1345-9678
    • Lee J, Mayer M, Zhou N and Persic J 2008 Microelectronic wire bonding with insulated Au wire-effects of process parameters on insulation removal and crescent bonding Mater. Trans., JIM 49 2347-53
    • (2008) Mater. Trans., JIM , vol.49 , Issue.10 , pp. 2347-2353
    • Lee, J.1    Mayer, M.2    Zhou, N.3    Persic, J.4
  • 53
    • 84881134012 scopus 로고    scopus 로고
    • Kulicke and Soffa Industries Inc.
    • Kulicke and Soffa Industries Inc. (www.kns.com)
  • 54
    • 84881163107 scopus 로고    scopus 로고
    • Shinkawa Ltd
    • Shinkawa Ltd (www.shinkawa.com)
  • 55
    • 84881162491 scopus 로고    scopus 로고
    • ASM Pacific Technology Ltd
    • ASM Pacific Technology Ltd (www.asmpacific.com)
  • 56
    • 84881141303 scopus 로고    scopus 로고
    • Hesse and Knipps Semiconductor Equipment GmbH
    • Hesse and Knipps Semiconductor Equipment GmbH (www.hesse-knipps.com/)
  • 57
    • 84881129482 scopus 로고    scopus 로고
    • Palomar Technologies
    • Palomar Technologies (www.palomartechnologies.com/)
  • 58
    • 84881141612 scopus 로고    scopus 로고
    • Questar Products International Inc.
    • Questar Products International Inc. (www.questarproducts.com/)
  • 59
    • 84881160425 scopus 로고    scopus 로고
    • West Bond Inc.
    • West Bond Inc. (www.westbond.com/)
  • 60
    • 84881169341 scopus 로고    scopus 로고
    • Hybond Inc.
    • Hybond Inc. (www.hybond.com/)
  • 61
    • 84881152262 scopus 로고    scopus 로고
    • Tpt Wire Bonder
    • Tpt Wire Bonder (www.tpt-wirebonder.com/)
  • 62
    • 84881167045 scopus 로고    scopus 로고
    • F and K Delvotec Bondtechnik GmbH
    • F and K Delvotec Bondtechnik GmbH (www.fkdelvotec.com/)
  • 63
    • 36849117602 scopus 로고
    • Technique for connecting electrical leads to semiconductors
    • 10.1063/1.1722893 0021-8979
    • Anderson O L, Christensen H and Andreatch P 1957 Technique for connecting electrical leads to semiconductors J. Appl. Phys. 28 923
    • (1957) J. Appl. Phys. , vol.28 , Issue.8 , pp. 923
    • Anderson, O.L.1    Christensen, H.2    Andreatch, P.3
  • 64
    • 84881176056 scopus 로고    scopus 로고
    • Sonobond Ultrasonics Inc.
    • Sonobond Ultrasonics Inc. (www.sonobondultrasonic.com)
  • 65
    • 33751336202 scopus 로고
    • Ultrasonic welding of aluminum leads to tantalum thin films
    • 0543-5722
    • Coucoulas A 1966 Ultrasonic welding of aluminum leads to tantalum thin films Trans. Met. Soc. AIME 236 587-9
    • (1966) Trans. Met. Soc. AIME , vol.236 , pp. 587-589
    • Coucoulas, A.1
  • 67
    • 84881186797 scopus 로고    scopus 로고
    • Gaiser Tool Company
    • Gaiser Tool Company (www.gaisertool.com)
  • 68
    • 84881171625 scopus 로고    scopus 로고
    • Texas instruments Inc.
    • Texas instruments Inc. (www.ti.com)
  • 69
    • 84881190118 scopus 로고    scopus 로고
    • Texas Instruments Incorporated 1992 Integrated-circuit wire bonder, international historic mechanical engineering landmark designated March 31, 1992 Technical Report
    • Texas Instruments Incorporated 1992 Integrated-circuit wire bonder, international historic mechanical engineering landmark designated March 31, 1992 Technical Report
  • 70
    • 84881180287 scopus 로고    scopus 로고
    • BE Semiconductor Industries N.V.
    • BE Semiconductor Industries N.V. (www.besi.com)
  • 74
    • 50149113090 scopus 로고
    • Simple inductance formulas for radio coils
    • 0731-5996
    • Wheeler H 1928 Simple inductance formulas for radio coils Proc. Inst. Radio Eng. 16 1398-400
    • (1928) Proc. Inst. Radio Eng. , vol.16 , pp. 1398-1400
    • Wheeler, H.1
  • 75
    • 71649097125 scopus 로고    scopus 로고
    • High aspect ratio PMMA posts and characterization method for micro coils manufactured with an automatic wire bonder
    • 10.1016/j.sna.2009.10.010 0924-4247 A
    • Kratt K, Badilita V, Burger T, Mohr J, Börner M, Korvink J and Wallrabe U 2009 High aspect ratio PMMA posts and characterization method for micro coils manufactured with an automatic wire bonder Sensors Actuators A 156 328-33
    • (2009) Sensors Actuators , vol.156 , Issue.2 , pp. 328-333
    • Kratt, K.1    Badilita, V.2    Burger, T.3    Mohr, J.4    Börner, M.5    Korvink, J.6    Wallrabe, U.7
  • 84
    • 78650859249 scopus 로고    scopus 로고
    • Three-dimensional microcoils as terahertz metamaterial with electric and magnetic response
    • 10.1063/1.3530435 0003-6951 261105
    • Waselikowski S, Kratt K, Badilita V, Wallrabe U, Korvink J G and Walther M 2010 Three-dimensional microcoils as terahertz metamaterial with electric and magnetic response Appl. Phys. Lett. 97 261105
    • (2010) Appl. Phys. Lett. , vol.97 , Issue.26
    • Waselikowski, S.1    Kratt, K.2    Badilita, V.3    Wallrabe, U.4    Korvink, J.G.5    Walther, M.6
  • 86
    • 79960896519 scopus 로고    scopus 로고
    • Integration of a monolithic buck converter power ICw and bondwire inductors with ferrite epoxy glob cores
    • 10.1109/TPEL.2010.2100829 0885-8993
    • Jia H, Lu J, Wang X, Padmanabhan K and Shen Z J 2011 Integration of a monolithic buck converter power ICw and bondwire inductors with ferrite epoxy glob cores IEEE Trans. Power Electron. 26 1627-30
    • (2011) IEEE Trans. Power Electron. , vol.26 , Issue.6 , pp. 1627-1630
    • Jia, H.1    Lu, J.2    Wang, X.3    Padmanabhan, K.4    Shen, Z.J.5
  • 87
    • 77954153180 scopus 로고    scopus 로고
    • Modeling, design, and characterization of multiturn bondwire inductors with ferrite epoxy glob cores for power supply system-on-chip or system-in-package applications
    • 10.1109/TPEL.2010.2045514 0885-8993
    • Lu J, Jia H, Wang X, Padmanabhan K, Hurley W and Shen Z 2010 Modeling, design, and characterization of multiturn bondwire inductors with ferrite epoxy glob cores for power supply system-on-chip or system-in-package applications IEEE Trans. Power Electron. 25 2010-7
    • (2010) IEEE Trans. Power Electron. , vol.25 , Issue.8 , pp. 2010-2017
    • Lu, J.1    Jia, H.2    Wang, X.3    Padmanabhan, K.4    Hurley, W.5    Shen, Z.6
  • 88
    • 77954160122 scopus 로고    scopus 로고
    • On-chip bondwire magnetics with ferrite-epoxy glob coating for power systems on chip
    • 10.1155/2008/678415 1687-6679
    • Lu J, Jia H, Arias A, Gong X and Shen Z J 2008 On-chip bondwire magnetics with ferrite-epoxy glob coating for power systems on chip Int. J. Power Manag. Electron. 2008 1-9
    • (2008) Int. J. Power Manag. Electron. , vol.2008 , pp. 1-9
    • Lu, J.1    Jia, H.2    Arias, A.3    Gong, X.4    Shen, Z.J.5
  • 90
    • 77950397282 scopus 로고    scopus 로고
    • A high-efficient transformer using bond wires for Si RF IC
    • 10.1587/transele.E93.C.140 0916-8524
    • Cho E, Lee S, Lee J and Nam S 2010 A high-efficient transformer using bond wires for Si RF IC IEICE Trans. Electron. 93 140-1
    • (2010) IEICE Trans. Electron. , vol.93-100 , Issue.1 , pp. 140-141
    • Cho, E.1    Lee, S.2    Lee, J.3    Nam, S.4
  • 92
    • 51849137876 scopus 로고    scopus 로고
    • Performance and modeling of bonding wire transformers in a package for RF IC's
    • Lin K-Y and El-Gamal M 2007 Performance and modeling of bonding wire transformers in a package for RF IC's ICM'07: Int. Conf. on Microelectronics pp 347-50
    • (2007) ICM'07: Int. Conf. on Microelectronics , pp. 347-350
    • Lin, K.-Y.1    El-Gamal, M.2
  • 93
    • 84861427130 scopus 로고    scopus 로고
    • Micro-transformer based isolated signal and power transmission
    • 10.1109/TPEL.2012.2189250 0885-8993
    • Raimann M, Peter A, Mager D, Wallrabe U and Korvink J 2012 Micro-transformer based isolated signal and power transmission IEEE Trans. Power Elect. 27 3996-4004
    • (2012) IEEE Trans. Power Elect. , vol.27 , Issue.9 , pp. 3996-4004
    • Raimann, M.1    Peter, A.2    Mager, D.3    Wallrabe, U.4    Korvink, J.5
  • 94
    • 84881184865 scopus 로고    scopus 로고
    • 2010 private communication
    • (2010)
  • 95
    • 84881172311 scopus 로고    scopus 로고
    • 2011 private communication
    • (2011)
  • 97
    • 79953802102 scopus 로고    scopus 로고
    • A fully MEMS-compatible process for 3D high aspect ratio micro coils obtained with an automatic wire bonder
    • 0960-1317 015021
    • Kratt K, Badilita V, Burger T, Korvink J and Wallrabe U 2010 A fully MEMS-compatible process for 3D high aspect ratio micro coils obtained with an automatic wire bonder J. Micromech. Microeng. 20 015021
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.1
    • Kratt, K.1    Badilita, V.2    Burger, T.3    Korvink, J.4    Wallrabe, U.5
  • 101
    • 73049104314 scopus 로고    scopus 로고
    • A Yagi-Uda array of high-efficiency wire-bond antennas for on-chip radio applications
    • 10.1109/TMTT.2009.2034051 0018-9480
    • Willmot R, Kim D and Peroulis D 2009 A Yagi-Uda array of high-efficiency wire-bond antennas for on-chip radio applications IEEE Trans. Microw. Theory Tech. 57 3315-21
    • (2009) IEEE Trans. Microw. Theory Tech. , vol.57 , Issue.12 , pp. 3315-3321
    • Willmot, R.1    Kim, D.2    Peroulis, D.3
  • 107
    • 51849164970 scopus 로고    scopus 로고
    • Novel slow-wave structure using bond-wire for miniaturizing microwave devices
    • Lim Y-K and Lee H-Y 2007 Novel slow-wave structure using bond-wire for miniaturizing microwave devices APMC'07: Asia-Pacific Microwave Conf. pp 1-4
    • (2007) APMC'07: Asia-Pacific Microwave Conf. , pp. 1-4
    • Lim, Y.-K.1    Lee, H.-Y.2
  • 110
    • 79951985209 scopus 로고    scopus 로고
    • Active-inductor-matched 6-GHZ duplexer-less LNA/PA design incorporated with a bondwire-antenna
    • 10.1002/mop.25823 0895-2477
    • Ahmed A 2011 Active-inductor-matched 6-GHZ duplexer-less LNA/PA design incorporated with a bondwire-antenna Microw. Opt. Technol. Lett. 53 761-6
    • (2011) Microw. Opt. Technol. Lett. , vol.53 , Issue.4 , pp. 761-766
    • Ahmed, A.1
  • 113
    • 44049094485 scopus 로고    scopus 로고
    • Integrated RF interference suppression filter design using bond-wire inductors
    • DOI 10.1109/TMTT.2008.921297, 4484970
    • Khatri H, Gudem P and Larson L 2008 Integrated RF interference suppression filter design using bond-wire inductors IEEE Trans. Microw. Theory Tech. 56 1024-34 (Pubitemid 351709499)
    • (2008) IEEE Transactions on Microwave Theory and Techniques , vol.56 , Issue.5 , pp. 1024-1034
    • Khatri, H.1    Gudem, P.S.2    Larson, L.E.3
  • 116
    • 79951771171 scopus 로고    scopus 로고
    • Integration of piezoelectric tunable capacitors and bonded-wire inductors for contactless RF switch and tunable filter
    • 10.1016/j.sna.2009.12.026 0924-4247 A
    • Chen S-J, Lee C-Y and Kim E S 2011 Integration of piezoelectric tunable capacitors and bonded-wire inductors for contactless RF switch and tunable filter Sensors Actuators A 165 73-78
    • (2011) Sensors Actuators , vol.165 , Issue.1 , pp. 73-78
    • Chen, S.-J.1    Lee, C.-Y.2    Kim, E.S.3
  • 117
    • 34249688469 scopus 로고    scopus 로고
    • High-speed bonding of resin-coated Cu wire and Sn electrode with ultrasonic bonding for high-frequency chip coil
    • Shohjia I, Sakuraib T and Arai S 2005 High-speed bonding of resin-coated Cu wire and Sn electrode with ultrasonic bonding for high-frequency chip coil Key Eng. Mater. 297-300 2819-24 (Pubitemid 46842268)
    • (2005) Key Engineering Materials , vol.297-300 IV , pp. 2819-2824
    • Shohji, I.1    Sakurai, T.2    Arai, S.3
  • 121
    • 67349098839 scopus 로고    scopus 로고
    • Flexible chip-scale package and interconnect for implantable MEMS movable microelectrodes for the brain
    • 10.1109/JMEMS.2009.2013391 1057-7157
    • Jackson N and Muthuswamy J 2009 Flexible chip-scale package and interconnect for implantable MEMS movable microelectrodes for the brain IEEE/ASME J. Microelectromech. Syst. 18 396-404
    • (2009) IEEE/ASME J. Microelectromech. Syst. , vol.18 , Issue.2 , pp. 396-404
    • Jackson, N.1    Muthuswamy, J.2
  • 122
    • 78049309811 scopus 로고    scopus 로고
    • Maskless shaping of gold stud bumps as high aspect ratio microstructures
    • 10.1016/j.mee.2010.08.005 0167-9317
    • Rekha P, Crain M and Walsh K 2011 Maskless shaping of gold stud bumps as high aspect ratio microstructures Microelectron. Eng. 88 135-9
    • (2011) Microelectron. Eng. , vol.88 , Issue.1 , pp. 135-139
    • Rekha, P.1    Crain, M.2    Walsh, K.3
  • 124
    • 65949106158 scopus 로고    scopus 로고
    • Spatially arranged microelectrodes using wire bonding technology for spatially distributed chemical information acquisition
    • Tonomura W, Shimizu K and Konishi S 2009 Spatially arranged microelectrodes using wire bonding technology for spatially distributed chemical information acquisition MEMS: IEEE Int. Conf. on Micro Electro Mechanical Systems pp 741-4
    • (2009) MEMS: IEEE Int. Conf. on Micro Electro Mechanical Systems , pp. 741-744
    • Tonomura, W.1    Shimizu, K.2    Konishi, S.3
  • 125
    • 78149240925 scopus 로고    scopus 로고
    • A fully integrated CMOS accelerometer using bondwire inertial sensing
    • 10.1109/JSEN.2010.2052031 1530-437X
    • Liao Y-T, Biederman W and Otis B 2011 A fully integrated CMOS accelerometer using bondwire inertial sensing IEEE Sensors J. 11 114-22
    • (2011) IEEE Sensors J. , vol.11 , Issue.1 , pp. 114-122
    • Liao, Y.-T.1    Biederman, W.2    Otis, B.3
  • 130
    • 80053341378 scopus 로고    scopus 로고
    • Wire-to-wire bonding of μm-diameter aluminum wires for the electric solar wind sail
    • 10.1016/j.mee.2011.07.002 0167-9317
    • Seppanen H, Kiprich S, Kurppa R, Janhunen P and Hæggström E 2011 Wire-to-wire bonding of μm-diameter aluminum wires for the electric solar wind sail Microelectron. Eng. 88 3267-9
    • (2011) Microelectron. Eng. , vol.88 , Issue.11 , pp. 3267-3269
    • Seppanen, H.1    Kiprich, S.2    Kurppa, R.3    Janhunen, P.4    Hæggström, E.5
  • 139
    • 84881169946 scopus 로고    scopus 로고
    • Hermetic integration of liquids using high-speed stud bump bonding for cavity sealing at the wafer level
    • 0960-1317 045021
    • Antelius M, Fischer A C, Niklaus F, Stemme G and Roxhed N 2012 Hermetic integration of liquids using high-speed stud bump bonding for cavity sealing at the wafer level J. Micromech. Microeng. 22 045021
    • (2012) J. Micromech. Microeng. , vol.22 , Issue.4
    • Antelius, M.1    Fischer, A.C.2    Niklaus, F.3    Stemme, G.4    Roxhed, N.5
  • 143
    • 0003610530 scopus 로고    scopus 로고
    • Olver K A 2010 A new technique for wirebonding using indium spheres Technical Report Army Research Laboratory, Adelphi, MD ARL-TR-5240
    • (2010) Technical Report
    • Olver, K.A.1
  • 144
    • 84923978408 scopus 로고    scopus 로고
    • Assembly using X-Wire insulated bonding wire technology
    • Lyn R and Crockett W 2007 Assembly using X-Wire insulated bonding wire technology Proc. SEMICON (Singapore) pp 1-7
    • (2007) Proc. SEMICON (Singapore) , pp. 1-7
    • Lyn, R.1    Crockett, W.2
  • 146
    • 47249106032 scopus 로고    scopus 로고
    • Electrical interconnection through optimized wirebonding onto su-8 structures and actuators
    • 0960-1317 075023
    • Sameoto D, Lee S W and Parameswaran M 2008 Electrical interconnection through optimized wirebonding onto su-8 structures and actuators J. Micromech. Microeng. 18 075023
    • (2008) J. Micromech. Microeng. , vol.18 , Issue.7
    • Sameoto, D.1    Lee, S.W.2    Parameswaran, M.3
  • 147
    • 36749003203 scopus 로고    scopus 로고
    • Experimental demonstration of a wafer-level flexible probe for optical waveguide testing
    • DOI 10.1364/OE.15.016210
    • Zakariya A J, Liu T and Panepucci R R 2007 Experimental demonstration of a wafer-level flexible probe for optical waveguide testing Opt. Express 15 16210-5 (Pubitemid 350211840)
    • (2007) Optics Express , vol.15 , Issue.24 , pp. 16210-16215
    • Zakariya, A.J.1    Liu, T.2    Panepucci, R.R.3
  • 148
    • 84881186524 scopus 로고    scopus 로고
    • Annual report 09/10 Fraunhofer IZM, Germany
    • Fraunhofer 2010 Annual report 09/10 Fraunhofer IZM, Germany Technical Report pp 38-39
    • (2010) Technical Report , pp. 38-39
    • Fraunhofer1
  • 149
    • 0036862648 scopus 로고    scopus 로고
    • Flexible polymer waveguides for optical wire bonds
    • 1464-4258 357
    • Clark C, Robinson J and Clayton R 2002 Flexible polymer waveguides for optical wire bonds J. Opt. A: Pure Appl. Opt. 4 S224
    • (2002) J. Opt. A: Pure Appl. Opt. , vol.4 , Issue.6 , pp. 224
    • Clark, C.1    Robinson, J.2    Clayton, R.3
  • 153
    • 70349130763 scopus 로고    scopus 로고
    • Direct wire-bonding to silicon devices without the use of metallic layers
    • Hirshberg A and Elata D 2008 Direct wire-bonding to silicon devices without the use of metallic layers ASME Conf. Proc. vol 2008 pp 303-6
    • (2008) ASME Conf. Proc. , vol.2008 , pp. 303-306
    • Hirshberg, A.1    Elata, D.2
  • 157
    • 84957971195 scopus 로고    scopus 로고
    • Gradin H 2012 Heterogeneous integration of shape memory alloysfor high-performance microvalves PhD Dissertation KTH, Microsystem Technology
    • (2012) PhD Dissertation
    • Gradin, H.1
  • 159
    • 79958280952 scopus 로고    scopus 로고
    • Wafer-level heterogeneous integration for MOEMS, MEMS, and NEMS
    • 10.1109/JSTQE.2010.2093570 1077-260X
    • Lapisa M, Stemme G and Niklaus F 2011 Wafer-level heterogeneous integration for MOEMS, MEMS, and NEMS EEE J. Sel. Top. Quantum Electron. 17 629-44
    • (2011) EEE J. Sel. Top. Quantum Electron. , vol.17 , Issue.3 , pp. 629-644
    • Lapisa, M.1    Stemme, G.2    Niklaus, F.3


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