A novel infrared microbolometer in standard CMOS-MEMS process

2014 IEEE International Symposium on Bioelectronics and Bioinformatics, IEEE ISBB 2014

Volumn , Issue , 2014, Pages

  Sheu, Meng Lieh ^a   Chen, Ji Yi ^a   Li, Ming Shang ^a   Tsao, Lin Jie ^a  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

infrared microbolometer; MEMS; micro cavity; temperature sensor

Indexed keywords

BIOINFORMATICS; BIOSENSORS; BOLOMETERS; MEMS; MICROCAVITIES; TEMPERATURE SENSORS;

ABSORPTIVITIES; BIOMEDICAL SENSORS; CAVITY STRUCTURE; CHIP AREAS; INFRARED ENERGY; MEMS POST PROCESS; MICROBOLOMETER; TEMPERATURE RANGE;

MOEMS;

EID: 84904540244     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISBB.2014.6820898     Document Type: Conference Paper

References (5)

1. C. Chen, X. Yi, X. Zhao, and B. Xiong, "Design and fabrication of linear array IR bolometers using VO2 thin films," in IEEE Infrared and Millimeter Waves Conference Dig., Beijing, Sept 2000, pp. 211-212.
2. D. S. Tezcan, S. Eminoglu, O. S. Akar, T. Akin, "A low cost uncooled infrared microbolometer focal plane array using the CMOS n-well layer," in IEEE Micro Electro Mechanical System, Interlaken, Jan. 2001, pp. 566-569
3. S. Ye, G. Zhang, X. Wang, D. Wang, Z. Liu, "Research and preparation of two-dimensional plane arrays thermal image sensor," in Proc. ICT, Beijing, June 2001, pp. 487-490.
4. A. Hossain and M. H. Rashid, "Pyroelectric detectors and their applications," IEEE Tran. Industry Applications, vol. 27, no. 5, pp. 824-829, 1-5 Oct 1989.
5. CIC User Handbook-0.18μm CMOS MEMS Process v.2.3, Chip Implementation Center, September 2011.