Pressure sensors based on suspended graphene membranes

Solid-State Electronics

Volumn 88, Issue , 2013, Pages 89-94

  Smith, Anderson D ^a   Vaziri, Sam ^a   Niklaus, Frank ^a   Fischer, Andreas C ^a   Sterner, Mikael ^a   Delin, Anna ^a   Östling, Mikael ^a   Lemme, Max C ^a,b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITY OF SIEGEN   (Germany)

Author keywords

Graphene; Nanotechnology; NEMS and Nanoelectromechanical System; Piezoresistive; Pressure; Sensor

Indexed keywords

GRAPHENE; NANOTECHNOLOGY; PRESSURE; SENSORS; STRAIN GAGES;

CMOS COMPATIBLE; ELECTRICAL MEASUREMENT; FABRICATION PROCESS; PIEZO-RESISTIVE; SENSING MECHANISM; STRAIN-INDUCED CHANGE; SUSPENDED GRAPHENE; TIGHT-BINDING CALCULATIONS;

PRESSURE SENSORS;

EID: 84884979426     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2013.04.019     Document Type: Article

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