A miniature low-cost LWIR camera with a 160×120 microbolometer FPA

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 9070, Issue , 2014, Pages

  Tepegoz, Murat ^a   Kucukkomurler, Alper ^a   Tankut, Firat ^a   Eminoglu, Selim ^a   Akin, Tayfun ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

CMOS microbolometer; Infrared; Low cost thermal imaging; LWIR; MEMS; Microbolometer; MS1670A VP; MSE070D; ROIC; Thermal camera; Uncooled thermal imaging

Indexed keywords

APPLICATION PROGRAMMING INTERFACES (API); APPLICATION PROGRAMS; BOLOMETERS; CAMERAS; COMMERCE; COMPUTER SYSTEMS PROGRAMMING; COSTS; INFRARED DEVICES; INFRARED IMAGING; MEMS; MOBILE DEVICES; MOEMS; SOFTWARE TESTING; TEMPERATURE SENSORS;

LWIR; MICROBOLOMETER; MS1670A-VP; MSE070D; ROIC; THERMAL CAMERA; UNCOOLED THERMAL IMAGING;

INFRARED RADIATION;

EID: 84906261366     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2057508     Document Type: Conference Paper

References (21)

1. D. F. Murphy, M. Ray, A. Kennedy, J. Wyles, C. Hewitt, R. Wyles, E. Gordon, T. Sessler, S. Baur, and D. Van Lue, "High Sensitivity 640 × 512 (20 um Pitch) Microbolometer FPAs, " Infrared Technology and Applications XXXII, Proc. SPIE Vol. 6206, pp. 446-459, 2006.
2. A. Tanaka, K. Chibq T. Endoha, K. Okuyama, A. Kawaharq K. Iida, and N. Tsukamoto, "Low-Noise Readout Circuit for Uncooled Infrared FPA, " Infrared Technology and Applications XXVI, Proc. SPlE Vol. 4130, pp. 160-167, 2000. (Pubitemid 32256904)
3. J. L. Heat, G. T. Kincaid, J. T. Woolaway, W. I. Parrish, D. Lohrmann, G. Newsome, A. Inosecu, J. Monsen, C. Rau, P. Howard, and C. Li, "160 x 128 Uncooled FPA Performance Review, " Infrared Technology and Applications XXV, Proc. SPIE Vol. 3698, pp. 256-263, 1999.
4. B. S. Backer, N. Butler, M. Kohin, M. Gurnee, J. T. Whitwam, and T. Breen, "Recent Improvements and Developments in Uncooled Systems at BAE SYSTEMS North America, " Infrared Detectors and Focal Plane Arrays VII, Proc. SPIE Vol. 4721, pp. 83-90, 2002.
5. J.-L. Tissot, F. Rothan, C. Vedel, M. Villian, and J.-J. YON, "LETI/LIR's Amorphous Silicon Uncooled Microbolometer Development, " Infrared Detectors and Focal Plane Arrays V, SPIE Vol. 3379, pp. 139-144, 1998.
6. D. Fujisawa, T. Maegawa, Y. Ohta, Y. Kosasayama, T. Ohnakado, H. Hata, M. Ueno, H. Ohji, R. Sato, H. Katayama, T. Imai, and M. Ueno, "Two-million- pixel SOI diode uncooled IRFPA with 15um pixel pitch, " Infrared Technology and Applications XXXVIII, Proc. SPIE 8353, pp. 83531G, 2012.
7. I. Fujiwara, K. Sasaki, K. Suzuki, H. Yagi, and H. Kwon, "Scale down of p-n junction diodes of an uncooled IR-FPA for improvement of the sensitivity and thermal time response by 0. 13-μm CMOS technology", Infrared Technology and Applications XXXVII, Proc. SPIE 8012, pp. 80121G, 2011.
8. P. Robert, J. Tissot, D. Pochic, V. Gravot, F. Bonnaire, H. Clerambault, A. Durand, and S. Tinnes, "Easy to use uncooled VGA 17 μm FPA development for high performance compact and low-power systems, " Infrared Technology and Applications XXXVIII, Proc. SPIE 8353, pp. 83531F, 2012.
9. G. Dumont, W. Rabaud, J.-J. Yon, L. Carle, V. Goudon, C. Vialle, S. Becker, A. Hamelin, and A. Arnaud, "Current progress on pixel level packaging for uncooled IRFPA, " Infrared Technology and Applications XXXVIII, Proc. SPIE 8353, pp. 83531I, 2012.
10. M. Kimata, "Trends in small-format infrared array sensors, " IEEE Sensors, pp. 1-4, 2013.
11. "Micro80P Brochure A single product for imaging and advanced detection", 2013.
12. "LEPTON Longwave Infrared (LWIR) Camera Module Product Brief, " Jan. 2014.
13. S. Eminoglu, M. Y. Tanrikulu, and T. Akin, "A Low-Cost 128x128 Uncooled Infrared Detector Array in CMOS Process, " IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 17, No. 1, pp. 20-30, February 2008. (Pubitemid 351343914)
14. S. Eminoglu, D. Sabuncuoglu Tezcan, M. Y. Tanrikulu, and T. Akin, "Low-Cost Uncooled Infrared Detectors in CMOS Process, " Sensors and Actuators A, Vol. 109/1-2, pp. 102-113, Dec. 2003.
15. D. Sabuncuoglu Tezcan, S. Eminoglu, and T. Akin, "A Low Cost Uncooled Infrared Microbolometer Detector in Standard CMOS Technology, " IEEE Trans. on Electron Devices, Vol. 50, No. 2, pp. 494-502, Feb. 2003.
16. S. Eminoglu, M. Y. Tanrikulu, and T. Akin, "Low-Cost 64x64 Uncooled Infrared Detector Arrays in Standard CMOS, " The 12th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03, Eurosensors XV), pp. 316-319, Boston, Massachusetts, June 8-12, 2003.
17. S. Eminoglu, M. Y. Tanrikulu, and T. Akin, "Low-Cost Uncooled Infrared Detector Arrays in Standard CMOS, " SPIE AeroSense Symposium, Infrared Technology and Applications XXIX (Aerosense 2003), SPIE Vol. 5074, pp. 425-436, Orlando, Florida, April 21-25, 2003.
18. S. Eminoglu, D. Sabuncuoglu Tezcan, M. Y. Tanrikulu, and T. Akin, "Low-Cost Uncooled Infrared Detectors in CMOS Process, " The 16th European Conf. on Solid-State Transducers (Eurosensors XVI), pp. 480-483, Prague, Czech Republic, September 15-18, 2002.
19. S. Eminoglu, M. Y. Tanrikulu, D. Sabuncuoglu Tezcan, and T. Akin, "A Low-Cost, Small Pixel Uncooled Infrared Detector for Large Focal Plane Arrays using a Standard CMOS Process, " SPIE AeroSense Symp., Infrared Technology and Applications XXVIII (Aerosense 2002), SPIE Vol. 4721, pp. 111-121, Orlando, Florida, April 1-5, 2002.
20. S. Eminoglu, D. S. Tezcan, and T. Akin, "CMOS N-Well Microbolometer FPA with Temperature Coefficient Enhancement Circuitry, " SPIE AeroSense Symposium, Infrared Technology and Applications XXVII (Aerosense 2001), SPIE Vol. 4369, pp. 240-249, Orlando, Florida, April 16-20, 2001.
21. D. S. Tezcan, S. Eminoglu, O. S. Akar, and T. Akin, "An Uncooled Microbolometer Infrared Focal Plane Array in Standard CMOS, " Photodetector Materials and Devices VI (Opto-electronics 2001), SPIE Vol. 4288, Jan. 20-26, 2001