Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit

European Solid-State Circuits Conference

Volumn , Issue , 2003, Pages 611-614

  Ylimaula, Miikka ^a   Åberg, Markku ^a   Kiihamaki, Jyrki ^a   Ronkainen, Hannu ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BULK CMOS; BURIED OXIDES; CAPACITIVE PRESSURE SENSORS; CMOS RELAXATION OSCILLATORS; LOW POWER; MICRO-MECHANICAL; READ-OUT CIRCUIT; VACUUM CAVITY;

CMOS INTEGRATED CIRCUITS; PARTIAL PRESSURE SENSORS; READOUT SYSTEMS; SILICON WAFERS;

LOW POWER ELECTRONICS;

EID: 4644292972     PISSN: 19308833     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSCIRC.2003.1257209     Document Type: Conference Paper

References (10)

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