A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 34-42

  Alper, Said Emre ^a   Azgin, Kivanc ^a   Akin, Tayfun ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Angular rate sensor; Gyroscope; Mechanical decoupling; SOI gyroscope

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; MEMS; NATURAL FREQUENCIES; SENSORS; SILICON ON INSULATOR TECHNOLOGY;

ANGULAR RATE SENSITIVITY; ANGULAR RATE SENSOR; MECHANICAL DECOUPLING; NOISE EQUIVALENT RATE;

GYROSCOPES;

EID: 33947248107     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.043     Document Type: Article

References (10)

1. Yazdi N., Ayazi F., and Najafi K. Micromachined inertial sensors. Proc. IEEE 86 August (8) (1998) 1640-1659
2. Funk K., Emmerich H., Schilp A., Offenberg M., Neul R., and Larmer F. A surface micromachined silicon gyroscope using a thick polysilicon layer. The 12th IEEE Int. Conf. Micro Electro Mechanical Systems Workshop (MEMS'99). Orlando, FL (January 1999) 57-60
3. He G., and Najafi K. A single-crystal silicon vibrating ring gyroscope. Proc. 15th IEEE Int. Conf. Las Vegas, CA (January 2002) 718-721
4. Geen J.A., Sherman S.J., Chang J.F., and Lewis S.R. Single-chip surface micromachined intergated gyroscope with 50°/h allan deviation. J. Solid State Circuits 37 December (12) (2002) 1860-1866
5. Kranz M.S., and Fedder G.K. Micromechanical vibratory rate gyroscopes fabricated in conventional CMOS. Symp. on Gyro Tech. (1997) 3.0-3.8
6. Alper S.E., and Akin T. A symmetric surface micromachined gyroscope with decoupled oscillation modes. Sens. Actuators A 97-98C (April 2002) 337-348
7. Alper S.E., and Akin T. A symmetrical and decoupled nickel microgyroscope on insulating substrate. Sens. Actuators A 115 (September 2004) 336-350
8. Alper S.E., and Akin T. A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate. J. Microelectromech. Syst. 14 August (4) (2005) 707-717
9. Alper S.E., Azgin K., and Akin T. High-performance SOI-MEMS gyroscope with decoupled oscillation modes. Proc. 19th IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS 2006). Istanbul, Turkey, 22-26 January (2005) 70-73
10. http://www.memsrus.com/nc-mumps.soi.html