Motion MEMS and sensors, today and tomorrow

Nyquist AD Converters, Sensor Interfaces, and Robustness - Advances in Analog Circuit Design, AACD 2012

Volumn , Issue , 2013, Pages 117-127

  Vigna, Benedetto ^a   Lasalandra, E ^a   Ungaretti, T ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ANALOG CIRCUITS; AUTOMOTIVE INDUSTRY; GYROSCOPES; INTEGRATED CIRCUIT MANUFACTURE; MOTION SENSORS; SILICON;

CONSUMER MARKET; DEGREE OF FREEDOM; LOW-POWER CONSUMPTION; MARKET REQUIREMENTS; MICROMACHINED DEVICES; SIX DEGREE-OF-FREEDOM; STMICROELECTRONICS; VOLUME PRODUCTION;

DEGREES OF FREEDOM (MECHANICS);

EID: 84881235677     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-1-4614-4587-6_7     Document Type: Conference Paper

References (5)

1. Vigna B (2011) STMicroelectronics masters the art and the science of MEMS. Semicon, Taiwan
2. Geen J et al (2002) Single-chip surface micromachined integrated gyroscope with 50-/h Allan deviation. IEEE J Solid-St Circ 37:1860-1866
3. Antonello R, Oboe R, Prandi L, Biganzoli F, Caminada C (2011) Open a low power 3-axis digital output MEMS gyroscope with single drive and multiplexed angular rate readout. In: International solid-state circuits conference, San Francisco, Feb 2011
4. Vigna B (2012) Consumer device go SMART with MEMS. Semicon, China
5. Johnson C (2012) Ten technologies that will change consumer devices. EETimes, 23 Jan 2012