Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 637-640

  Brosnihan, Timothy J ^a   Bustillo, James M ^a   Pisano, Albert P ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CMOS INTEGRATED CIRCUITS; ELECTRONICS PACKAGING; MASKS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

ELECTRICAL ISOLATION;

SILICON SENSORS;

EID: 0030720750     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)