Very large scale integration of MOEMS mirrors, MEMS angular amplifiers and high-voltage, high-density IC electronics for photonic switching

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 2, Issue , 2003, Pages 428-431

  Bryzek, Janusz ^a   Nasiri, Steven ^a   Flannery, Anthony ^a   Kwon, Haesung ^a   Novack, Mitch ^a   Marx, David ^a   Sigari, Elaheh ^a   Chen, Eddy ^a   Garate, Jaime ^a  

^a Transparent Networks   (United States)

Author keywords

MEMS; Mirror; MOEMS; Optical; Photonic switching; Telecom

Indexed keywords

MECHANICAL LINKAGES; PHOTONIC SWITCHING; POWER REQUIREMENTS; SERIAL INTERFACES;

BANDWIDTH; COST EFFECTIVENESS; ELECTROSTATICS; MIRRORS; OPTICAL SWITCHES; PHOTONS; VLSI CIRCUITS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344233294     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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