메뉴 건너뛰기




Volumn , Issue , 2009, Pages 313-331

Miniaturised sensor node for tire pressure monitoring (e-CUBES)

Author keywords

3D integration; MEMS; Through silicon via; Tire pressure monitoring system

Indexed keywords

3-D INTEGRATION; BULK ACOUSTIC RESONATORS; ELECTRICAL RESISTANCES; INTERCONNECT DEVICES; THROUGH-SILICON VIA; THROUGH-SILICON VIA (TSV) TECHNOLOGIES; TIRE PRESSURE MONITORING; TIRE-PRESSURE MONITORING SYSTEMS;

EID: 84884293891     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-642-00745-3_21     Document Type: Conference Paper
Times cited : (12)

References (35)
  • 1
    • 33845389410 scopus 로고    scopus 로고
    • Energy conservation from systematic tire pressure regulation
    • Pearce, J.M., Hanlon, J.T., "Energy conservation from systematic tire pressure regulation", Energy Policy, Vol. 35, pp. 2673-2677, 2007.
    • (2007) Energy Policy , vol.35 , pp. 2673-2677
    • Pearce, J.M.1    Hanlon, J.T.2
  • 3
    • 84884328072 scopus 로고    scopus 로고
    • www.ecubes.org
  • 5
    • 34250798471 scopus 로고    scopus 로고
    • Damascene-patterned metal-adhesive (Cu-BCB) redistribution layers
    • Gutmann, R.J., et al. "Damascene-patterned metal-adhesive (Cu-BCB) redistribution layers", MRS Symposium Processings, Vol 970, pp. 205-214, 2007.
    • (2007) MRS Symposium Processings , vol.970 , pp. 205-214
    • Gutmann, R.J.1
  • 6
    • 0346938517 scopus 로고    scopus 로고
    • 3D system integration technologies
    • Ramm, P., Klumpp, et al. "3D system integration technologies", MRS Symposium Processings, Vol 766, pp. 3-14, 2003.
    • (2003) MRS Symposium Processings , vol.766 , pp. 3-14
    • Ramm, P.1    Klumpp2
  • 7
    • 28344456237 scopus 로고    scopus 로고
    • 3D chip stacking technology using trough-chip interconnects
    • Benkart, P. et al. "3D chip stacking technology using trough-chip interconnects", IEEE Design and Test of Computers, Vol. 22, pp. 512-518, 2005.
    • (2005) IEEE Design and Test of Computers , vol.22 , pp. 512-518
    • Benkart, P.1
  • 8
    • 25844453501 scopus 로고    scopus 로고
    • Development of next-generation system-on-package (SOP) technology based on silicon carriers with fine-pitch chip interconnection
    • Knickerbocker, et al. "Development of next-generation system-on-package (SOP) technology based on silicon carriers with fine-pitch chip interconnection", IBM Journal of Research and Development, Vol. 49, pp. 725-753, 2005.
    • (2005) IBM Journal of Research and Development , vol.49 , pp. 725-753
    • Knickerbocker1
  • 10
    • 34250811358 scopus 로고    scopus 로고
    • Silicon layer stacking enabled by wafer bonding
    • Tan, C.S., et al. "Silicon layer stacking enabled by wafer bonding", MRS Symposium Processings, Vol 970, pp. 193-204, 2007.
    • (2007) MRS Symposium Processings , vol.970 , pp. 193-204
    • Tan, C.S.1
  • 11
    • 4444275224 scopus 로고    scopus 로고
    • Vertical system integration by using inter-chip vias and solid-liquid interdiffusion bonding
    • Klumpp, A., Merkel, R., Ramm, P., Weber, J., Wieland, R., "Vertical system integration by using inter-chip vias and solid-liquid interdiffusion bonding", Japanese Journal of Applied Physics Part 2, Vol. 43, Issue 7a, pp. L829-L830, 2004.
    • (2004) Japanese Journal of Applied Physics Part 2 , vol.43 A , Issue.7
    • Klumpp, A.1    Merkel, R.2    Ramm, P.3    Weber, J.4    Wieland, R.5
  • 12
    • 70449589401 scopus 로고    scopus 로고
    • 3D process integration - Requirements and challenges
    • To be published
    • Wolf, M.J., et al. "3D Process Integration - Requirements and Challenges", To be published in MRS Symposium Proceedings, Vol 1112.
    • MRS Symposium Proceedings , vol.1112
    • Wolf, M.J.1
  • 13
    • 34250901773 scopus 로고    scopus 로고
    • Current and future three-dimensional LSI integration technology by chip-on-chip, chip-on-wafer and wafer-on-wafer
    • Bonkohara, M., et al. "Current and future three-dimensional LSI integration technology by chip-on-chip, chip-on-wafer and wafer-on-wafer", MRS Symposium Processings, Vol 970, pp. 35-45, 2007.
    • (2007) MRS Symposium Processings , vol.970 , pp. 35-45
    • Bonkohara, M.1
  • 14
    • 84884315341 scopus 로고    scopus 로고
    • A 3-dimensional wafer-level stacking technology with precise vertical interconnections to MEMS applications
    • Munich, Germany, June
    • Park, K.T., et al. "A 3-dimensional wafer-level stacking technology with precise vertical interconnections to MEMS applications", Proceedings of Transducers'01/ Eurosensors XV, Digest of technical papers, pp. 1590-1593, Munich, Germany, June 2001.
    • (2001) Proceedings of Transducers'01/ Eurosensors XV, Digest of Technical Papers , pp. 1590-1593
    • Park, K.T.1
  • 15
    • 84884332187 scopus 로고    scopus 로고
    • http://www.planoptik.com/produkte/produkte-en.html
  • 16
    • 84884315981 scopus 로고    scopus 로고
    • http:/www.silex.com.au
  • 19
    • 0242303135 scopus 로고    scopus 로고
    • High density, high aspect ratio through-wafer electrical interconnect vias for MEMS packaging
    • Ok, S. J., Kim, C., Baldwin, D.F., "High density, high aspect ratio through-wafer electrical interconnect vias for MEMS packaging", IEEE Transactions on advanced packaging, Vol. 26, pp. 302 - 309, 2003.
    • (2003) IEEE Transactions on Advanced Packaging , vol.26 , pp. 302-309
    • Ok, S.J.1    Kim, C.2    Baldwin, D.F.3
  • 20
    • 84884310358 scopus 로고    scopus 로고
    • Fabrication of silicon based through-wafer interconnects for advanced chip scale packaging
    • Contribution M3C-P1, Gothenburg, Sweden
    • Ji, F., Leppävuori, et al. "Fabrication of silicon based through-wafer interconnects for advanced chip scale packaging", Proceedings of Eurosensors XX, Contribution M3C-P1, Gothenburg, Sweden, 2006.
    • (2006) Proceedings of Eurosensors XX
    • Ji, F.1    Leppävuori2
  • 21
    • 38849092544 scopus 로고    scopus 로고
    • RF-MEMS wafer-level packaging using through-wafer interconnect
    • Tian, J., et al. "RF-MEMS wafer-level packaging using through-wafer interconnect", Sensors and Actuators A, Vol. 142, pp. 442-451, 2008.
    • (2008) Sensors and Actuators A , vol.142 , pp. 442-451
    • Tian, J.1
  • 22
    • 34250851629 scopus 로고    scopus 로고
    • High density bond interconnect (DBI) technology for three dimensional integrated circuit applications
    • Enquist, P., "High density bond interconnect (DBI) technology for three dimensional integrated circuit applications", MRS Symposium Processings, Vol 970, pp. 19-24, 2007.
    • (2007) MRS Symposium Processings , vol.970 , pp. 19-24
    • Enquist, P.1
  • 23
    • 51349095699 scopus 로고    scopus 로고
    • Development and evaluation of lead free reflow soldering techniques for the flip chip bonding of large GaAs pixel detectors on si readout chip
    • Orlando, Florida, 27-30 May
    • th ECTC, pp. 1893-1899, Orlando, Florida, 27-30 May 2008.
    • (2008) th ECTC , pp. 1893-1899
    • Klein, M.1
  • 24
    • 51349132537 scopus 로고    scopus 로고
    • Through silicon via technology-processes and reliability for wafer-level 3D system integration
    • Orlando, Florida, 27-30 May
    • th ECTC, pp. 841-846, Orlando, Florida, 27-30 May 2008.
    • (2008) th ECTC , pp. 841-846
    • Ramm, P.1
  • 25
    • 84884341959 scopus 로고    scopus 로고
    • http://www.schott.com/epackaging/english/auto/others/hermes.html
  • 26
    • 84884310746 scopus 로고    scopus 로고
    • http://www.silexmicrosystems.com/pages/
  • 29
    • 84884295122 scopus 로고    scopus 로고
    • www.kns.com
  • 30
    • 84884324326 scopus 로고    scopus 로고
    • Innstrasse 16, A-6240 Radfeld, Austria
    • Datacon semiconductor, Innstrasse 16, A-6240 Radfeld, Austria
    • Datacon Semiconductor
  • 33
    • 0036862575 scopus 로고    scopus 로고
    • Laser direct structuring of plastics - A new addition to MID technologies
    • Wissbrock, H., "Laser direct structuring of plastics - A new addition to MID technologies", Kunststoffe-Plast Europe, Vol. 92, p. 101, 2002.
    • (2002) Kunststoffe-Plast Europe , vol.92 , pp. 101
    • Wissbrock, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.